estudio y caracterización de un plasma de microondas a presión ...
estudio y caracterización de un plasma de microondas a presión ...
estudio y caracterización de un plasma de microondas a presión ...
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Capítulo 6<br />
Figure 6.7 shows that the power increase translates into an increase in the<br />
rotational temperature. The same is true in the case of vibrational temperature (Fig. 6.8),<br />
which shows that the temperature increases with increasing microwave power supplied<br />
to the <strong>plasma</strong>, keeping the same <strong>de</strong>cline in their values for higher axial positions. This<br />
increase in temperatures is due to greater input of energy to electrons, which is then<br />
transmitted by heavy particle collisions. The rotational temperature increase results in<br />
the highest percentage of <strong>de</strong>struction <strong>de</strong>tected, which is a result of the reduced chance of<br />
recombination of initial CCl4 by the <strong>de</strong>pen<strong>de</strong>nce of recombination with the gas<br />
temperature, as was discussed in the previous section.<br />
Axial Position (mm)<br />
35<br />
30<br />
25<br />
20<br />
15<br />
10<br />
5<br />
1.5 L/min, 300 W, 1000 ppm CCl 4<br />
CN<br />
I (a.u.)<br />
-1,5 -1,0 -0,5 0,0 0,5 1,0 1,5<br />
Radial Position (mm)<br />
Axial Position (mm)<br />
35<br />
30<br />
25<br />
20<br />
15<br />
10<br />
5<br />
0<br />
75,00<br />
150,0<br />
225,0<br />
300,0<br />
375,0<br />
450,0<br />
525,0<br />
600,0<br />
675,0<br />
750,0<br />
825,0<br />
900,0<br />
975,0<br />
1050<br />
1125<br />
1200<br />
-1,5 -1,0 -0,5 0,0 0,5 1,0 1,5<br />
Radial Position (mm)<br />
Figure 6.9: Radial and axial distribution of CN in the helium <strong>plasma</strong> with 1000 ppm of carbon<br />
tetrachlori<strong>de</strong> for three different values of microwave power.<br />
Axial Position (mm)<br />
35<br />
30<br />
25<br />
20<br />
15<br />
10<br />
5<br />
1.5 L/min, 600 W, 1000 ppm CCl 4<br />
CN<br />
1.5 L/min, 900 W, 1000 ppm CCl 4<br />
CN<br />
I (a.u.)<br />
-1,5 -1,0 -0,5 0,0 0,5 1,0 1,5<br />
Radial Position (mm)<br />
0<br />
125,0<br />
250,0<br />
375,0<br />
500,0<br />
625,0<br />
750,0<br />
875,0<br />
1000<br />
1125<br />
1250<br />
1375<br />
1500<br />
1625<br />
1750<br />
1875<br />
2000<br />
I (a.u.)<br />
0<br />
75,00<br />
150,0<br />
225,0<br />
300,0<br />
375,0<br />
450,0<br />
525,0<br />
600,0<br />
675,0<br />
750,0<br />
825,0<br />
900,0<br />
975,0<br />
1050<br />
1125<br />
1200<br />
159