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estudio y caracterización de un plasma de microondas a presión ...

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Capítulo 6<br />

Figure 6.7 shows that the power increase translates into an increase in the<br />

rotational temperature. The same is true in the case of vibrational temperature (Fig. 6.8),<br />

which shows that the temperature increases with increasing microwave power supplied<br />

to the <strong>plasma</strong>, keeping the same <strong>de</strong>cline in their values for higher axial positions. This<br />

increase in temperatures is due to greater input of energy to electrons, which is then<br />

transmitted by heavy particle collisions. The rotational temperature increase results in<br />

the highest percentage of <strong>de</strong>struction <strong>de</strong>tected, which is a result of the reduced chance of<br />

recombination of initial CCl4 by the <strong>de</strong>pen<strong>de</strong>nce of recombination with the gas<br />

temperature, as was discussed in the previous section.<br />

Axial Position (mm)<br />

35<br />

30<br />

25<br />

20<br />

15<br />

10<br />

5<br />

1.5 L/min, 300 W, 1000 ppm CCl 4<br />

CN<br />

I (a.u.)<br />

-1,5 -1,0 -0,5 0,0 0,5 1,0 1,5<br />

Radial Position (mm)<br />

Axial Position (mm)<br />

35<br />

30<br />

25<br />

20<br />

15<br />

10<br />

5<br />

0<br />

75,00<br />

150,0<br />

225,0<br />

300,0<br />

375,0<br />

450,0<br />

525,0<br />

600,0<br />

675,0<br />

750,0<br />

825,0<br />

900,0<br />

975,0<br />

1050<br />

1125<br />

1200<br />

-1,5 -1,0 -0,5 0,0 0,5 1,0 1,5<br />

Radial Position (mm)<br />

Figure 6.9: Radial and axial distribution of CN in the helium <strong>plasma</strong> with 1000 ppm of carbon<br />

tetrachlori<strong>de</strong> for three different values of microwave power.<br />

Axial Position (mm)<br />

35<br />

30<br />

25<br />

20<br />

15<br />

10<br />

5<br />

1.5 L/min, 600 W, 1000 ppm CCl 4<br />

CN<br />

1.5 L/min, 900 W, 1000 ppm CCl 4<br />

CN<br />

I (a.u.)<br />

-1,5 -1,0 -0,5 0,0 0,5 1,0 1,5<br />

Radial Position (mm)<br />

0<br />

125,0<br />

250,0<br />

375,0<br />

500,0<br />

625,0<br />

750,0<br />

875,0<br />

1000<br />

1125<br />

1250<br />

1375<br />

1500<br />

1625<br />

1750<br />

1875<br />

2000<br />

I (a.u.)<br />

0<br />

75,00<br />

150,0<br />

225,0<br />

300,0<br />

375,0<br />

450,0<br />

525,0<br />

600,0<br />

675,0<br />

750,0<br />

825,0<br />

900,0<br />

975,0<br />

1050<br />

1125<br />

1200<br />

159

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