estudio y caracterización de un plasma de microondas a presión ...

Capítulo 6
results obtained in previous works, where it was found that DRE increases with higher
concentrations of introduced pollutants [21, 22].
Figure 6.11 shows that in the case of the vibrational temperature, a decreasing
behaviour with increasing concentration of residue introduced. Figure 6.12 represents an
axial and radial distribution of CN for the four tested concentration levels. There is an
increase in plasma volume when an increasing concentration is introduced such that the
microwave energy is distributed in a larger volume, decreasing the electronic and
vibrational temperature.
Vibrational Temperature (K)
16000 Vibrational Temperature
Helium Plasma
14000
600W, 1,5L/min, CCl4 0 ppm
10 ppm
12000
100 ppm
1000 ppm
10000
10000 ppm
8000
6000
4000
0 5 10 15 20 25
Axial position (mm)
Figure 6.11: Axial distribution of vibrational temperature in a helium plasma for four
concentrations and the situation with no residue.
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