Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
Bidirectional vs. Unidirectional<br />
Positioning Repeatability<br />
• Unidirectional- target always approached from<br />
one direction<br />
• Bidirectional- target approached from both<br />
directions.<br />
• Applies to both linear and rotary systems