Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
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Rotary <strong>Stage</strong> Definitions<br />
• X Direction – Fixed: Radial Motion, Repeatable and<br />
Non-repeatable<br />
• Y Direction – Fixed: Radial Motion, Repeatable and<br />
Non-repeatable<br />
• Z Direction – Fixed: Axial, Repeatable and Nonrepeatable<br />
• Ө x – Fixed: Tilt Error in XZ plane<br />
• Ө y – Fixed: Tilt Error in YZ plane<br />
• Ө z – Free: Positioning Accuracy and Repeatability
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