Stage Metrology Concepts: Application Specific ... - Owens Design

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Squareness • Arises when we combine axes • Example: Squareness of XY <strong>Stage</strong> System – Measured using a square and indicator – Need to take measure at appropriate height – Combines rotation and linear errors
Fixed vs. Moving Sensitive Direction • Affects appropriate orientation of indicator and reference surface when measuring straightness • Example- Single axis microscope – Sample Fixed – Sample Moving – Indicator should always be mounted where the objective is mounted.
Page 1 and 2: Stage Metrology Concepts: Applicati
Page 3 and 4: Basic Definitions • Accuracy- the
Page 5 and 6: Accuracy, Repeatability & Resolutio
Page 7 and 8: Stage Errors - Linear
Page 9 and 10: Abbe’ Error • Linear Errors are
Page 11 and 12: Bidirectional vs. Unidirectional Po
Page 13: Bidirectional Repeatability
Page 17 and 18: Rotary Stage Errors Axial Radial Ti
Page 19 and 20: 2D Accuracy • Renishaw lasers use
Page 21 and 22: Proposal • Define performance in
Page 23 and 24: Example - 2 Axis XY System • Requ
Page 25 and 26: Example - 3 Axis RӨZ System • Re
Page 27 and 28: Conclusion • Defining stage speci
Page 29 and 30: Linear vs. Mechanical Bearings Para
Page 31 and 32: Reversal- Setup 1
Page 33: Reversal- Math T 1 (Z) = P(Z) + S(Z

Stage Metrology Concepts: Application Specific ... - Owens Design

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