Stage Metrology Concepts: Application Specific ... - Owens Design

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Error Correction- Mapping • Errors measured and stored in computer as a lookup table or function • Mapping data must travel with stage • Only as accurate as repeatability of system as measured and in use. • Meaningful only if done at appropriate Abbe’ height
2D Accuracy • Renishaw lasers used with an optical square to calibrate out accuracy, straightness, yaw, and orthogonality in one test • Laser outputs are read into two free encoder inputs of an A3200 system. Need to do this to synchronize the encoder and laser information • Matlab is used to post process the results and generate 2D calibration files Courtesy of Aerotech
Page 1 and 2: Stage Metrology Concepts: Applicati
Page 3 and 4: Basic Definitions • Accuracy- the
Page 5 and 6: Accuracy, Repeatability & Resolutio
Page 7 and 8: Stage Errors - Linear
Page 9 and 10: Abbe’ Error • Linear Errors are
Page 11 and 12: Bidirectional vs. Unidirectional Po
Page 13 and 14: Bidirectional Repeatability
Page 15 and 16: Fixed vs. Moving Sensitive Directio
Page 17: Rotary Stage Errors Axial Radial Ti
Page 21 and 22: Proposal • Define performance in
Page 23 and 24: Example - 2 Axis XY System • Requ
Page 25 and 26: Example - 3 Axis RӨZ System • Re
Page 27 and 28: Conclusion • Defining stage speci
Page 29 and 30: Linear vs. Mechanical Bearings Para
Page 31 and 32: Reversal- Setup 1
Page 33: Reversal- Math T 1 (Z) = P(Z) + S(Z

Stage Metrology Concepts: Application Specific ... - Owens Design

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