Stage Metrology Concepts: Application Specific ... - Owens Design

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Difficulty in Specifying <strong>Stage</strong>s Given All The Error Terms • <strong>Stage</strong>s typically specified in terms of the classical individual stage errors. • Performance we are interested in result from the combination of these errors
Proposal • Define performance in terms of applicationspecific tests • Specify individual errors only as necessary
Page 1 and 2: Stage Metrology Concepts: Applicati
Page 3 and 4: Basic Definitions • Accuracy- the
Page 5 and 6: Accuracy, Repeatability & Resolutio
Page 7 and 8: Stage Errors - Linear
Page 9 and 10: Abbe’ Error • Linear Errors are
Page 11 and 12: Bidirectional vs. Unidirectional Po
Page 13 and 14: Bidirectional Repeatability
Page 15 and 16: Fixed vs. Moving Sensitive Directio
Page 17 and 18: Rotary Stage Errors Axial Radial Ti
Page 19: 2D Accuracy • Renishaw lasers use
Page 23 and 24: Example - 2 Axis XY System • Requ
Page 25 and 26: Example - 3 Axis RӨZ System • Re
Page 27 and 28: Conclusion • Defining stage speci
Page 29 and 30: Linear vs. Mechanical Bearings Para
Page 31 and 32: Reversal- Setup 1
Page 33: Reversal- Math T 1 (Z) = P(Z) + S(Z

Stage Metrology Concepts: Application Specific ... - Owens Design

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