Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
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Squareness<br />
• Arises when we combine axes<br />
• Example: Squareness of XY <strong>Stage</strong> System<br />
– Measured using a square and indicator<br />
– Need to take measure at appropriate height<br />
– Combines rotation and linear errors
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