Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
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Reversal- Math<br />
T 1 (Z) = P(Z) + S(Z)<br />
T 2 (Z) = P(Z) - S(Z)<br />
T= Indicator Reading<br />
P= <strong>Stage</strong> Straightness Error<br />
S= Straightedge Straightness Error
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