Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
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<strong>Stage</strong> Errors – Single Axis<br />
• Degrees of Freedom<br />
– Translation <strong>Stage</strong><br />
• 3 Translations : 2 fixed, 1 free<br />
• 3 Rotations : All fixed<br />
– Rotary <strong>Stage</strong><br />
• 3 Translations : All fixed<br />
• 3 Rotations : 2 fixed, 1 free<br />
• Errors<br />
– Motions that are supposed to be fixed, but aren’t<br />
– Motions that are supposed to be free but are inaccurate<br />
– Both have repeatable and non-repeatable terms
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