Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
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Example – 3 Axis RӨZ System<br />
• Requirement to Position Sample Under<br />
Objective in R,Ө & Z to <strong>Specific</strong> Accuracy &<br />
Repeatability<br />
• Specify R,Ө Positioning Test<br />
• Specify Combined Z Straightness Test<br />
• Both need to be at height of sample and take<br />
into consideration moving vs. stationary<br />
objective
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