Stage Metrology Concepts: Application Specific ... - Owens Design

More documents

Recommendations

Info

Topics • Review of Stage Error Definitions • Setting Stage Specifications for Applications • Application-Specific Ways of Providing Stage Specifications
Basic Definitions • Accuracy- the degree to which a system produces the correct result compared to a standard reference • Repeatability- the degree to which a system produces the same result from run to run By definition, accuracy can not be better than repeatability, but repeatability can be better than accuracy. • Precision- the resolution/”fineness” to which a system can position.
Page 1: Stage Metrology Concepts: Applicati
Page 5 and 6: Accuracy, Repeatability & Resolutio
Page 7 and 8: Stage Errors - Linear
Page 9 and 10: Abbe’ Error • Linear Errors are
Page 11 and 12: Bidirectional vs. Unidirectional Po
Page 13 and 14: Bidirectional Repeatability
Page 15 and 16: Fixed vs. Moving Sensitive Directio
Page 17 and 18: Rotary Stage Errors Axial Radial Ti
Page 19 and 20: 2D Accuracy • Renishaw lasers use
Page 21 and 22: Proposal • Define performance in
Page 23 and 24: Example - 2 Axis XY System • Requ
Page 25 and 26: Example - 3 Axis RӨZ System • Re
Page 27 and 28: Conclusion • Defining stage speci
Page 29 and 30: Linear vs. Mechanical Bearings Para
Page 31 and 32: Reversal- Setup 1
Page 33: Reversal- Math T 1 (Z) = P(Z) + S(Z

Stage Metrology Concepts: Application Specific ... - Owens Design

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?