Stage Metrology Concepts: Application Specific ... - Owens Design

Abbe’ Error
• Linear Errors are affected by rotation errors an
amount that depends upon where the error is
measured.
• Horizontal Straightness Measured at A Given
Height is the sum of the straightness at the center
of roll + product of the roll and the height from the
roll center to the point of measurement
• Height– Abbe’ distance
• Error Component from roll – Abbe’ error