Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
Stage Metrology Concepts: Application Specific ... - Owens Design
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Linear <strong>Stage</strong> Definitions<br />
• X Direction – Free: Positioning Accuracy &<br />
Repeatability<br />
• Y Direction – Fixed: Horizontal Straightness Error,<br />
Repeatable and Non-repeatable<br />
• Z Direction – Fixed: Vertical Straightness, Repeatable<br />
and Non-repeatable<br />
• Ө x – Fixed: Roll Error<br />
• Ө y – Fixed: Pitch Error<br />
• Ө z – Fixed: Yaw Error
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