Stage Metrology Concepts: Application Specific ... - Owens Design

More documents

Recommendations

Info

4 Axis System Brushless DC Drives, 20 nm Resolution
Example – 3 Axis RӨZ System • Requirement to Position Sample Under Objective in R,Ө & Z to <strong>Specific</strong> Accuracy & Repeatability • Specify R,Ө Positioning Test • Specify Combined Z Straightness Test • Both need to be at height of sample and take into consideration moving vs. stationary objective
Page 1 and 2: Stage Metrology Concepts: Applicati
Page 3 and 4: Basic Definitions • Accuracy- the
Page 5 and 6: Accuracy, Repeatability & Resolutio
Page 7 and 8: Stage Errors - Linear
Page 9 and 10: Abbe’ Error • Linear Errors are
Page 11 and 12: Bidirectional vs. Unidirectional Po
Page 13 and 14: Bidirectional Repeatability
Page 15 and 16: Fixed vs. Moving Sensitive Directio
Page 17 and 18: Rotary Stage Errors Axial Radial Ti
Page 19 and 20: 2D Accuracy • Renishaw lasers use
Page 21 and 22: Proposal • Define performance in
Page 23: Example - 2 Axis XY System • Requ
Page 27 and 28: Conclusion • Defining stage speci
Page 29 and 30: Linear vs. Mechanical Bearings Para
Page 31 and 32: Reversal- Setup 1
Page 33: Reversal- Math T 1 (Z) = P(Z) + S(Z

Stage Metrology Concepts: Application Specific ... - Owens Design

Create successful ePaper yourself

Delete template?

Save as template?