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book of abstracts - IM2NP

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A B S T R A C T S THURSDAY, JULY 1 N A N O S E A 2 0 1 0<br />

9H40-10H00<br />

In(Ga)As quantum dots grown by Molecular Beam Epitaxy on Si substrates.<br />

A. EL AKRA1, H. DUMONT1, P. REGRENY1, D. PELLOUX-GERVAIS2, B.<br />

CANUT2, G. PATRIARCHE3, M. GENDRY1, J.M. JANCU4, J. EVEN4, C. BRU-<br />

CHEVALLIER2 (1 INL Université de Lyon, CNRS UMR-5270, Ecole Centrale de Lyon, 69134, Ecully,<br />

France. 2 INL Université de Lyon, CNRS UMR-5270, INSA de Lyon –Bât Blaise Pascal, 69621 Villeurbanne Cedex<br />

France. 3 LPN, CNRS UPR 20, route de Nozay, 91460 Marcoussis, France. 4 FOTON, CNRS 6082, INSA, 20<br />

avenue des buttes de Coesmes, 35708 Rennes Cedex 7). Catherine.Bru-Chevallier@insa-lyon.fr<br />

1 – Introduction<br />

The aim <strong>of</strong> this study is to achieve homogeneous, high density and dislocation free In(Ga)As quantum dots<br />

(QDs) grown by molecular beam epitaxy (MBE) on silicon substrates. This work is part <strong>of</strong> a project which<br />

aims at overcoming the severe limitation suffered by silicon regarding its optoelectronic applications,<br />

especially efficient light emission device. For this study, one <strong>of</strong> the key points is to overcome the expected<br />

type II InAs/Si interface by inserting the In(Ga)As QDs inside a thin silicon layer deposited on a SOI<br />

substrate. Confinement effects <strong>of</strong> the Si/SiO2 quantum well are expected to heighten the indirect silicon<br />

bandgap and then give rise to a type I interface with the In(Ga)As QDs. In order to get light emission from<br />

such QDs, a key point is to avoid any dislocations or defects in the In(Ga)As QDs.<br />

2 – Abstract<br />

The main factors responsible for the In(Ga)As QDs size, shape and structural quality are: the lattice<br />

mismatch between In(Ga)As and Si substrate, the surface energy <strong>of</strong> both In(Ga)As and Si, the interface<br />

energy between In(Ga)As and Si and the adatom mobility during the growth process. We investigated the dot<br />

size distribution and density at different V/III beam equivalent pressure (BEP) ratios and different growth<br />

temperatures. TEM images are used to study the structural quality <strong>of</strong> the QDs. Dislocation free In(Ga)As QD<br />

were successfully obtained. RBS-channeling analysis <strong>of</strong> such QDs on Si will also be presented. Optical<br />

properties and band alignment are modeled within the tight binding approximation and state <strong>of</strong> the art DFT<br />

calculations.<br />

3 – Conclusion<br />

Further works are going on concerning the capping <strong>of</strong> these In(Ga)As QD by a silicon epilayer in order to get<br />

efficient PL emission from these In(Ga)As QD elaborated on Si substrates.<br />

This work is supported by the ANR-pnano program (project “BIQUINIS”).<br />

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