book of abstracts - IM2NP
book of abstracts - IM2NP
book of abstracts - IM2NP
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A B S T R A C T S THURSDAY, JULY 1 N A N O S E A 2 0 1 0<br />
9H40-10H00<br />
In(Ga)As quantum dots grown by Molecular Beam Epitaxy on Si substrates.<br />
A. EL AKRA1, H. DUMONT1, P. REGRENY1, D. PELLOUX-GERVAIS2, B.<br />
CANUT2, G. PATRIARCHE3, M. GENDRY1, J.M. JANCU4, J. EVEN4, C. BRU-<br />
CHEVALLIER2 (1 INL Université de Lyon, CNRS UMR-5270, Ecole Centrale de Lyon, 69134, Ecully,<br />
France. 2 INL Université de Lyon, CNRS UMR-5270, INSA de Lyon –Bât Blaise Pascal, 69621 Villeurbanne Cedex<br />
France. 3 LPN, CNRS UPR 20, route de Nozay, 91460 Marcoussis, France. 4 FOTON, CNRS 6082, INSA, 20<br />
avenue des buttes de Coesmes, 35708 Rennes Cedex 7). Catherine.Bru-Chevallier@insa-lyon.fr<br />
1 – Introduction<br />
The aim <strong>of</strong> this study is to achieve homogeneous, high density and dislocation free In(Ga)As quantum dots<br />
(QDs) grown by molecular beam epitaxy (MBE) on silicon substrates. This work is part <strong>of</strong> a project which<br />
aims at overcoming the severe limitation suffered by silicon regarding its optoelectronic applications,<br />
especially efficient light emission device. For this study, one <strong>of</strong> the key points is to overcome the expected<br />
type II InAs/Si interface by inserting the In(Ga)As QDs inside a thin silicon layer deposited on a SOI<br />
substrate. Confinement effects <strong>of</strong> the Si/SiO2 quantum well are expected to heighten the indirect silicon<br />
bandgap and then give rise to a type I interface with the In(Ga)As QDs. In order to get light emission from<br />
such QDs, a key point is to avoid any dislocations or defects in the In(Ga)As QDs.<br />
2 – Abstract<br />
The main factors responsible for the In(Ga)As QDs size, shape and structural quality are: the lattice<br />
mismatch between In(Ga)As and Si substrate, the surface energy <strong>of</strong> both In(Ga)As and Si, the interface<br />
energy between In(Ga)As and Si and the adatom mobility during the growth process. We investigated the dot<br />
size distribution and density at different V/III beam equivalent pressure (BEP) ratios and different growth<br />
temperatures. TEM images are used to study the structural quality <strong>of</strong> the QDs. Dislocation free In(Ga)As QD<br />
were successfully obtained. RBS-channeling analysis <strong>of</strong> such QDs on Si will also be presented. Optical<br />
properties and band alignment are modeled within the tight binding approximation and state <strong>of</strong> the art DFT<br />
calculations.<br />
3 – Conclusion<br />
Further works are going on concerning the capping <strong>of</strong> these In(Ga)As QD by a silicon epilayer in order to get<br />
efficient PL emission from these In(Ga)As QD elaborated on Si substrates.<br />
This work is supported by the ANR-pnano program (project “BIQUINIS”).<br />
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