46 CHAPTER 2. EXPERIMENTAL METHODSspectra is clearly visible a different optical behaviour <strong>of</strong> the system as a function <strong>of</strong> thepolarization <strong>of</strong> light (two split sharp peaks for s- <strong>and</strong> p-polarized light), while in theellipsometry spectra only one peak is present, broader <strong>and</strong> shifted in wavelength.2.3 Atomic Force MicroscopyThemorphological characterization <strong>of</strong>thesampleshasbeenperformedbymeans<strong>of</strong>atomicforce microscopy (AFM).Thistechniquewasdevelopedforthefirsttimein1986byBinnig,Quate <strong>and</strong> Gerber [180], <strong>and</strong> ever since has become a conventional <strong>and</strong> versatile method<strong>of</strong> surface analysis. AFM is a very high resolution type <strong>of</strong> scanning probe microscopy,capable <strong>of</strong> sub-Å vertical resolution <strong>and</strong> lateral resolution down to atomic resolution. Itis commonly employed for topographic imaging at nanoscale, but more advanced versionsexists which also allow to probe, for example, surface potentials, electric conductance ormagnetic domains.Feedback LoopControllerElectronicsUintermittent-contactregionDetectorElectronicsLaserx,yrepulsive forceattractive forcePosition-sensitivePhotodiodea.zpiezoCantileverSampleb.contactregionnon-contactregiondFigure 2.8: Panel a: sketch <strong>of</strong> a typical Non-Contact AFM Instrument Configuration.Panel b: schematic representation <strong>of</strong> the probe-sample interaction potential <strong>and</strong> AFMoperational modes.A typical AFM setup is depicted in fig. 2.8(a). The microscope consists <strong>of</strong> a very sharptip, with a few nanometers apex, located near the end <strong>of</strong> an elastic cantilever. By usingpiezoelectric stages, the tip is brought in close proximity to the sample, until an attractiveor repulsive interaction is established. This force leads to a proportional deflection <strong>of</strong> thecantilever, which is detected by means <strong>of</strong> a laser spot reflected from the back <strong>of</strong> thecantilever onto a position-sensitive photodiode. The relative position between the tip<strong>and</strong> the sample is controlled by a feedback loop, which drives the piezoelectric scannersaccording to the deflection <strong>of</strong> the cantilever, <strong>and</strong> generates the actual AFM images bymaintaining at constant level a particular operational parameter.Depending on the specific situation, several kind <strong>of</strong> forces can be measured. A typicalprobe-sample interaction potential is shown in fig. 2.8(b), as a function <strong>of</strong> the relativeseparation. When the tip is far from the sample, more than hundreds <strong>of</strong> nanometers,attractive long-range interactions prevail, like electrostatic or magnetic dipolar forces.Approaching the surface the attractive forces increase, <strong>and</strong> at a distance <strong>of</strong> the order <strong>of</strong>few nanometers the major contribution is from intermolecular Van der Waals interactions.
2.3. ATOMIC FORCE MICROSCOPY 47Reducing further the distance, the tip starts to penetrate the sample <strong>and</strong> locally deformsthe surface; elastic repulsion forces are now dominating, therefore the potential reaches aminimum, where the attractive <strong>and</strong> repulsive forces are equally balanced, <strong>and</strong> then rapidlydiverges.SurfaceCantileverSlow scan axisFast scan axisFigure 2.9: Sketch <strong>of</strong> an AFM acquisition. The sample is scanned line-by-line in the fastaxis direction <strong>and</strong> the tip-sample interaction is measured at a discrete set <strong>of</strong> points (blackcircles). At the end <strong>of</strong> each scan, the tip is shifted along the slow axis <strong>and</strong> brought backat the start <strong>of</strong> the line.AFM acquisitions are performed by running the tip over a specified area <strong>of</strong> the sample,<strong>and</strong> measuring the interaction with the surface at a discrete set <strong>of</strong> points, as sketched infig. 2.9. Depending on the kind <strong>of</strong> measurement <strong>and</strong> on the nature <strong>of</strong> the sample, severaloperational modes are available. In order to acquire topographic images <strong>of</strong> surfaces themost common ones are contact, non-contact <strong>and</strong> tapping modes.In contact AFM [180], the tip works in the repulsive range <strong>of</strong> the interaction potential<strong>and</strong> is dragged across the surface. During the scanning, the deflection <strong>of</strong> the cantilever iskept constant, <strong>and</strong> the corrections applied to the vertical piezoelectric stage provide thetopographic information. This technique is usually fast <strong>and</strong> very accurate, but for s<strong>of</strong>t orvery rough samples the strong repulsive forces (<strong>of</strong> the order <strong>of</strong> nN) can lead to irreversibledegradations <strong>of</strong> both the tip <strong>and</strong> the surface.Non-contact mode [181] resolves this issue by increasing the tip-sample separation toabout 50÷150 Å, in the range <strong>of</strong> the attractive Van der Waals forces. These forces areconsiderably weaker than the ones established in contact mode, so the tip is given a smalloscillation, <strong>and</strong> AC detection methods are used to detect the small changes in amplitude,phase, or frequency <strong>of</strong> the oscillating cantilever, in response to force gradients from thesample. This mode has the advantage that the tip is never in contact with the sample<strong>and</strong> therefore can not sketch or destroy it, however it provides lower resolution <strong>and</strong> inpresence <strong>of</strong> a fluid contaminant layer the oscillating probe can be trapped in the fluid,failing to image the true surface <strong>of</strong> the sample.Tapping AFM is an high resolution technique which overcomes both the problemsassociated with the degradation <strong>of</strong> the sample <strong>and</strong> with friction <strong>and</strong> adhesion. Like noncontactAFM, the tip is not static, however the oscillation amplitude is much higher(typically in the range 20÷200 nm), the tip being alternately in contact with the surface,to provide high resolution, <strong>and</strong> lifted <strong>of</strong>f, to avoid the alteration <strong>of</strong> the surface. As thetip approaches the sample, the force gradient alters the cantilever motion, modifying theamplitude, the resonance frequency, <strong>and</strong> the phase <strong>of</strong> the oscillations. During scanning,the feedback system adjusts the relative distance between the tip <strong>and</strong> the sample in orderto maintain one <strong>of</strong> these parameters at a constant level, <strong>and</strong> correspondingly generatesthe AFM image. Usually the topographic surface features are detected by monitoring