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NAMS 2002 Workshop - ICOM 2008

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membrane structures, which would be determined by their different<br />

manufacturing processes.<br />

The result of long term filtration test, using semiconductor plant metal-CMP<br />

wastewater, showed that the permeated water quality was good, for example Si:<br />

100ppm (raw water) to 5 ppm (filtrate); TOC: 20 ppm to 0.4 ppm and filtration<br />

was stable for over 5 months.

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