MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
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Flexural Mode <strong>Resonators</strong><br />
1D Mode shape described by combination of sinusoidal <strong>and</strong> hyperbolic functions<br />
(k is the wave vector)<br />
<strong>Frequency</strong> depends on beam thickness <strong>and</strong> length. Scaling<br />
to reach higher frequency. α depends on the type of beam<br />
(C-C, C-F, F-F)<br />
• Flexural resonators operate at their best at low frequency (ongoing<br />
research in NEMS beams): suitable <strong>for</strong> high Q <strong>and</strong> low frequency<br />
oscillator applications (10-100 MHz clocks, 32 KHz clocks)<br />
• Clamped-Clamped (C-C), Clamped-Free (C-F), <strong>and</strong> Free-Free (F-F)<br />
beams have been developed
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