MEMS Resonators for Frequency Control and Sensing Applications

Thermal Transduction
• Operation has been demonstrated up to ~ 60 MHz with
piezoresistive read out for in-plane vibrations.
• mW power consumption possible at GHz frequencies.
Pourkamali, U.
of Denver
• Resonator model is different since the transducer is resistive. The
device effectively becomes a resonant transistor (can have gain)
and could justify additional power consumption