MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
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From Mechanical to Electrical Variables<br />
• Acoustic/<strong>MEMS</strong> resonators are generally used inside electronic<br />
components. There<strong>for</strong>e the mechanical vibration (resonance)<br />
need to be transferred into an electrical signal.<br />
• A transducer is used to convert mechanical into electrical signal<br />
(<strong>and</strong> vice versa) so that the resonator can be directly interfaced<br />
with electronics. In the figure above the transducer is<br />
represented by a capacitor <strong>and</strong> a trans<strong>for</strong>mer with a turn ratio set<br />
by η (known as the electromechanical coupling; note that this is<br />
different from k t 2 which is also known as the electromechanical<br />
coupling coefficient)
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