MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
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Temperature Compensation<br />
• Several methods of temperature compensation have been attempted.<br />
Most effective are:<br />
– Mechanical compensation : incorporation of a material with positive TCF<br />
in the device (such as SiO 2 or complex oxides)<br />
– Silicon doping<br />
– Ckt compensation (by frequency pulling)<br />
Mechanical Compensation<br />
• Addition of SiO2 layer in AlN CMR has<br />
yielded a first order TCF of ~ 0.<br />
• Oxide thickness has to be comparable to<br />
device thickness<br />
• Compensation attained over a very wide<br />
temperature range (also elevated<br />
temperatures)<br />
Pisano et al., UC Berkeley
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