MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
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Principle of Operation<br />
Admittance<br />
<strong>Frequency</strong><br />
• Key quantities that define a sensor per<strong>for</strong>mance:<br />
• Addition of mass onto the<br />
resonator affects its<br />
acoustic characteristics.<br />
• <strong>Frequency</strong> is generally<br />
monitored, but other<br />
variables such as phase<br />
<strong>and</strong> magnitude could also<br />
be measured<br />
– Sensitivity (amount of change in measured variable <strong>for</strong> change in measur<strong>and</strong>);<br />
depends on both transducer characteristics as well as chemically adsorbing<br />
layer<br />
– Limit of detection (LOD= minimum detectable change in the measur<strong>and</strong>)<br />
– Speed of detection (b<strong>and</strong>width required <strong>for</strong> accurate measurement; could<br />
ultimately be limited by the adsorbing layer & kinetics of reaction)<br />
– Selectivity (ability to distinguish one species from another: depends on the<br />
adsorbing layer <strong>and</strong> not the transducer)
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