MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
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<strong>MEMS</strong> <strong>Resonators</strong> <strong>for</strong><br />
Chemical <strong>Sensing</strong><br />
• Why <strong>MEMS</strong>/NEMS Acoustic Sensors?<br />
• Sensor characteristics: sensitivity <strong>and</strong> limit of detection<br />
• Examples of <strong>MEMS</strong>/NEMS sensors: nano beams, CMUT,<br />
FBAR <strong>and</strong> CMRs
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