MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
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Higher <strong>Frequency</strong> <strong>MEMS</strong> Oscillators<br />
• 1 GHz AlN CMR Oscillator<br />
Phase Noise [dBc/Hz]<br />
0<br />
-20<br />
-40<br />
-60<br />
-80<br />
-100<br />
-120<br />
-140<br />
-160<br />
10 1<br />
10 1<br />
10 2<br />
10 2<br />
1.05 GHz <strong>MEMS</strong> Oscillator<br />
50 µm<br />
VB2 −81 dBc/Hz GSM @ 1 Requirements kHz of UHF LO GSM<br />
10 3<br />
10 3<br />
10 4<br />
10 4<br />
10 5<br />
10 5<br />
Offset <strong>Frequency</strong> [Hz]<br />
Phase Noise Floor:<br />
−146 dBc/Hz<br />
10 6<br />
10 6<br />
10 7<br />
10 7<br />
<strong>MEMS</strong><br />
100 µm G S<br />
VDD1 G<br />
IC<br />
GND<br />
Requirements<br />
fm PN<br />
kHz dBc/Hz<br />
200 ≤ -118<br />
400 ≤ -124<br />
600 ≤ -127<br />
800 ≤ -130<br />
1600 ≤ -136<br />
> 3200 ≤ -141<br />
[Q. Gu, Springer 2005]<br />
V DD2<br />
G<br />
VOUT S G
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