MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
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Ladder Filters with Rectangular Plates<br />
• Ladder structures with 4,6 <strong>and</strong> 8 resonators have<br />
been demonstrated<br />
6<br />
8<br />
4<br />
Length-Extensional<br />
Mode<br />
Experimental<br />
Theory<br />
Width-Extensional<br />
Mode<br />
f c=93.2 MHz<br />
BW 3dB=305 kHz<br />
I.L.= -4 dB<br />
20dB S.F.= 2.2<br />
2kΩ Termination<br />
Rejection 27 dB
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