MEMS Resonators for Frequency Control and Sensing Applications

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Mechanical Coupling Tra ns m is s ion |S 21 | [dB] 0 -10 -20 -30 -40 -50 -60 2 Plates f c = 40 MHz I.L. = -1.5 dB BW frac = 0.98% R term = 1 kΩ -70 1 kΩ te rm ina tion 50 Ω te rm ina tion -50 -80 37.5 38 38.5 39 39.5 40 -60 40.5 41 41.5 42 42.5 F re que nc y [MHz ] -70 Transmission S | [dB] 21 S21 [dB] 0 -10 -20 -30 -40 20 dB 20 25 30 35 40 45 50 55 60 0 -10 -20 -30 -40 -50 Expe rime nt f c = 102 M Hz I.L. = -11 dB BW 20dB = 3.5% R term = 1 kΩ 0.9 0.92 0 .9 4 0.96 0.9 8 1 1.0 2 1 .0 4 1.0 6 1 .0 8 1 .1 x 10 8 -60 F re que nc y [Hz ] Tra ns m is s ion |S | [dB] 4 P a ra lle l, 6 S e rie s R e s ona to r Arra y Theory
Acoustic Coupling • Use of acoustic elements encompassing the entire device size to create multiple modes of vibration • B<strong>and</strong>width control by modulation of the acoustic pathway (overhang, spacing, number of coupling elements) • Technique is more easily scaled to higher frequencies (no need <strong>for</strong> sub-micron mechanical coupling elements)
Page 1 and 2:
MEMS Resonators for Frequency Contr
Page 3 and 4:
MEMS Resonators, RF Applications an
Page 5 and 6:
MEMS Resonator Applications SAW/Qua
Page 7 and 8:
RF MEMS Resonator Market Source: Yo
Page 9 and 10:
Mode of Vibration and Frequency Mod
Page 11 and 12:
Contour-Mode/Lamb-Wave Resonators T
Page 13 and 14:
Shear Mode Resonators Quartz MEMS,
Page 15 and 16:
From Mechanical to Electrical Varia
Page 17 and 18:
Transduction of MEMS Resonators •
Page 19 and 20: Electrostatic Transduction Nguyen,
Page 21 and 22: Electrostrictive Transduction Dubus
Page 23 and 24: Thermal Transduction • Operation
Page 25 and 26: Piezoelectric Transduction complian
Page 27 and 28: Piezoelectric Transduction T=250 nm
Page 29 and 30: Equivalent Circuit: 1-port devices
Page 31 and 32: Equivalent Circuit: 2-port devices
Page 33 and 34: Eq. Ckt: MEMS Resonator vs. SAW/Qua
Page 35 and 36: Figure of Merit (FOM) of a Resonato
Page 37 and 38: MEMS Oscillators • MEMS Oscillato
Page 39 and 40: MEMS Oscillators • MEMS-based osc
Page 41 and 42: Pierce Oscillator: Design Example w
Page 47 and 48: Higher Frequency MEMS Oscillators
Page 49 and 50: Some Other MEMS Oscillators • MEM
Page 51 and 52: Temperature Compensation • Severa
Page 53 and 54: Acceleration Sensitivity • Accele
Page 55 and 56: Fully Integrated MEMS Oscillators
Page 57 and 58: Frequency Accuracy and Stability
Page 59 and 60: Filter Opportunities • IF Filters
Page 61 and 62: Electrically Coupled Filters • El
Page 63 and 64: Ladder Filters with Rectangular Pla
Page 65 and 66: Filter Operation • Three Basic Re
Page 67 and 68: Model Fitting Magnitude of S21 [dB]
Page 69: Mechanical Coupling C M M M FBW3dB
Page 73 and 74: MEMS-Based RF Front-Ends: A Microsy
Page 75 and 76: Modular Integration of Components V
Page 77 and 78: Sub-Sampling RF Channel Select Rece
Page 79 and 80: Direct Frequency Synthesis • Narr
Page 81 and 82: Integration of MEMS Resonators and
Page 83 and 84: CMOS Integrated Solutions • Monol
Page 85 and 86: MEMS Resonators for Chemical Sensin
Page 87 and 88: Competitive Advantages over Other N
Page 89 and 90: Comparison of M/NEMS Resonators •
Page 91 and 92: LOD From Rubiola’s tutorial on ph
Page 93 and 94: NEMS Beams as Chemical Sensors Rouk
Page 95 and 96: FBAR as Chemical Sensor Esteve, Cen
Page 97 and 98: CMR-S Scaling T LOD • Scaling equ
Page 99 and 100: 250 nm CMR-S Array with Oscillator
Page 101 and 102: Array of ss-DNA functionalized CMR-
Page 103 and 104: Concluding Remarks • M/NEMS reson
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MEMS Resonators for Frequency Control and Sensing Applications

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