MEMS Resonators for Frequency Control and Sensing Applications

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Limit of Detection (LOD) • The limit of detection depends on the minimum detectable shift above noise. For a gravimetric chemical sensor this corresponds to the minimum detectable mass per unit area (N.B. per unit area, i.e. a concentration, not an absolute mass value). • In the case of a frequency measurement, the minimum detectable shift is determined by the phase noise (or better the Allan Variance) of the oscillator used to sustain the oscillation of the transducer. From Rubiola’s tutorial on phase noise • The square root of the Allan variance (standard deviation) corresponds to the minimum detectable frequency shift. The value of ∆f min depends on the measurement time (i.e. the measurement bandwidth)
LOD From Rubiola’s tutorial on phase noise • Note that flicker frequency noise will set the ultimate floor. For small integration times the white phase (resonator power handling) and white frequency (resonator thermo-mechanical noise) set the value of Allan Variance
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MEMS Resonators for Frequency Contr
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MEMS Resonators, RF Applications an
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MEMS Resonator Applications SAW/Qua
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RF MEMS Resonator Market Source: Yo
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Mode of Vibration and Frequency Mod
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Contour-Mode/Lamb-Wave Resonators T
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Shear Mode Resonators Quartz MEMS,
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From Mechanical to Electrical Varia
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Transduction of MEMS Resonators •
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Electrostatic Transduction Nguyen,
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Electrostrictive Transduction Dubus
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Thermal Transduction • Operation
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Piezoelectric Transduction complian
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Piezoelectric Transduction T=250 nm
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Equivalent Circuit: 1-port devices
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Equivalent Circuit: 2-port devices
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Eq. Ckt: MEMS Resonator vs. SAW/Qua
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Figure of Merit (FOM) of a Resonato
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MEMS Oscillators • MEMS Oscillato
Page 39 and 40: MEMS Oscillators • MEMS-based osc
Page 41 and 42: Pierce Oscillator: Design Example w
Page 47 and 48: Higher Frequency MEMS Oscillators
Page 49 and 50: Some Other MEMS Oscillators • MEM
Page 51 and 52: Temperature Compensation • Severa
Page 53 and 54: Acceleration Sensitivity • Accele
Page 55 and 56: Fully Integrated MEMS Oscillators
Page 57 and 58: Frequency Accuracy and Stability
Page 59 and 60: Filter Opportunities • IF Filters
Page 61 and 62: Electrically Coupled Filters • El
Page 63 and 64: Ladder Filters with Rectangular Pla
Page 65 and 66: Filter Operation • Three Basic Re
Page 67 and 68: Model Fitting Magnitude of S21 [dB]
Page 69 and 70: Mechanical Coupling C M M M FBW3dB
Page 71 and 72: Acoustic Coupling • Use of acoust
Page 73 and 74: MEMS-Based RF Front-Ends: A Microsy
Page 75 and 76: Modular Integration of Components V
Page 77 and 78: Sub-Sampling RF Channel Select Rece
Page 79 and 80: Direct Frequency Synthesis • Narr
Page 81 and 82: Integration of MEMS Resonators and
Page 83 and 84: CMOS Integrated Solutions • Monol
Page 85 and 86: MEMS Resonators for Chemical Sensin
Page 87 and 88: Competitive Advantages over Other N
Page 89: Comparison of M/NEMS Resonators •
Page 93 and 94: NEMS Beams as Chemical Sensors Rouk
Page 95 and 96: FBAR as Chemical Sensor Esteve, Cen
Page 97 and 98: CMR-S Scaling T LOD • Scaling equ
Page 99 and 100: 250 nm CMR-S Array with Oscillator
Page 101 and 102: Array of ss-DNA functionalized CMR-
Page 103 and 104: Concluding Remarks • M/NEMS reson
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MEMS Resonators for Frequency Control and Sensing Applications

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