- Page 1: MEMS Resonators for Frequency Contr
- Page 5 and 6: MEMS Resonator Applications SAW/Qua
- Page 7 and 8: RF MEMS Resonator Market Source: Yo
- Page 9 and 10: Mode of Vibration and Frequency Mod
- Page 11 and 12: Contour-Mode/Lamb-Wave Resonators T
- Page 13 and 14: Shear Mode Resonators Quartz MEMS,
- Page 15 and 16: From Mechanical to Electrical Varia
- Page 17 and 18: Transduction of MEMS Resonators •
- Page 19 and 20: Electrostatic Transduction Nguyen,
- Page 21 and 22: Electrostrictive Transduction Dubus
- Page 23 and 24: Thermal Transduction • Operation
- Page 25 and 26: Piezoelectric Transduction complian
- Page 27 and 28: Piezoelectric Transduction T=250 nm
- Page 29 and 30: Equivalent Circuit: 1-port devices
- Page 31 and 32: Equivalent Circuit: 2-port devices
- Page 33 and 34: Eq. Ckt: MEMS Resonator vs. SAW/Qua
- Page 35 and 36: Figure of Merit (FOM) of a Resonato
- Page 37 and 38: MEMS Oscillators • MEMS Oscillato
- Page 39 and 40: MEMS Oscillators • MEMS-based osc
- Page 41 and 42: Pierce Oscillator: Design Example w
- Page 43 and 44: Pierce Oscillator: Design Example w
- Page 45 and 46: Pierce Oscillator: Design Example w
- Page 47 and 48: Higher Frequency MEMS Oscillators
- Page 49 and 50: Some Other MEMS Oscillators • MEM
- Page 51 and 52: Temperature Compensation • Severa
- Page 53 and 54:
Acceleration Sensitivity • Accele
- Page 55 and 56:
Fully Integrated MEMS Oscillators
- Page 57 and 58:
Frequency Accuracy and Stability
- Page 59 and 60:
Filter Opportunities • IF Filters
- Page 61 and 62:
Electrically Coupled Filters • El
- Page 63 and 64:
Ladder Filters with Rectangular Pla
- Page 65 and 66:
Filter Operation • Three Basic Re
- Page 67 and 68:
Model Fitting Magnitude of S21 [dB]
- Page 69 and 70:
Mechanical Coupling C M M M FBW3dB
- Page 71 and 72:
Acoustic Coupling • Use of acoust
- Page 73 and 74:
MEMS-Based RF Front-Ends: A Microsy
- Page 75 and 76:
Modular Integration of Components V
- Page 77 and 78:
Sub-Sampling RF Channel Select Rece
- Page 79 and 80:
Direct Frequency Synthesis • Narr
- Page 81 and 82:
Integration of MEMS Resonators and
- Page 83 and 84:
CMOS Integrated Solutions • Monol
- Page 85 and 86:
MEMS Resonators for Chemical Sensin
- Page 87 and 88:
Competitive Advantages over Other N
- Page 89 and 90:
Comparison of M/NEMS Resonators •
- Page 91 and 92:
LOD From Rubiola’s tutorial on ph
- Page 93 and 94:
NEMS Beams as Chemical Sensors Rouk
- Page 95 and 96:
FBAR as Chemical Sensor Esteve, Cen
- Page 97 and 98:
CMR-S Scaling T LOD • Scaling equ
- Page 99 and 100:
250 nm CMR-S Array with Oscillator
- Page 101 and 102:
Array of ss-DNA functionalized CMR-
- Page 103 and 104:
Concluding Remarks • M/NEMS reson