MEMS Resonators for Frequency Control and Sensing Applications

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Fully Integrated MEMS Oscillators • AlN-CMR integrated with CMOS Olsson, Sandia National Laboratories, AlN CMR resonator • Nickel resonators integrated with CMOS Nguyen, UCB, Nickel resonator
Frequency Accuracy and Stability • General skepticism that MEMS (especially thin-film) devices will be able to attain the same frequency accuracy and stability shown by quartz crystal devices (10-100 ppm for most applications) • Although the skepticism might have some foundations, MEMS technology have come a long way and shown quite impressive results. • Packaging (see Bosch/SiTime/Kenny results) guarantees resonator stability over long time • Trimming of FBAR has shown better than 100 ppm frequency accuracy over a 6” wafer. Ruby, Avago
Page 1 and 2:
MEMS Resonators for Frequency Contr
Page 3 and 4:
MEMS Resonators, RF Applications an
Page 5 and 6: MEMS Resonator Applications SAW/Qua
Page 7 and 8: RF MEMS Resonator Market Source: Yo
Page 9 and 10: Mode of Vibration and Frequency Mod
Page 11 and 12: Contour-Mode/Lamb-Wave Resonators T
Page 13 and 14: Shear Mode Resonators Quartz MEMS,
Page 15 and 16: From Mechanical to Electrical Varia
Page 17 and 18: Transduction of MEMS Resonators •
Page 19 and 20: Electrostatic Transduction Nguyen,
Page 21 and 22: Electrostrictive Transduction Dubus
Page 23 and 24: Thermal Transduction • Operation
Page 25 and 26: Piezoelectric Transduction complian
Page 27 and 28: Piezoelectric Transduction T=250 nm
Page 29 and 30: Equivalent Circuit: 1-port devices
Page 31 and 32: Equivalent Circuit: 2-port devices
Page 33 and 34: Eq. Ckt: MEMS Resonator vs. SAW/Qua
Page 35 and 36: Figure of Merit (FOM) of a Resonato
Page 37 and 38: MEMS Oscillators • MEMS Oscillato
Page 39 and 40: MEMS Oscillators • MEMS-based osc
Page 41 and 42: Pierce Oscillator: Design Example w
Page 47 and 48: Higher Frequency MEMS Oscillators
Page 49 and 50: Some Other MEMS Oscillators • MEM
Page 51 and 52: Temperature Compensation • Severa
Page 53 and 54: Acceleration Sensitivity • Accele
Page 55: Fully Integrated MEMS Oscillators
Page 59 and 60: Filter Opportunities • IF Filters
Page 61 and 62: Electrically Coupled Filters • El
Page 63 and 64: Ladder Filters with Rectangular Pla
Page 65 and 66: Filter Operation • Three Basic Re
Page 67 and 68: Model Fitting Magnitude of S21 [dB]
Page 69 and 70: Mechanical Coupling C M M M FBW3dB
Page 71 and 72: Acoustic Coupling • Use of acoust
Page 73 and 74: MEMS-Based RF Front-Ends: A Microsy
Page 75 and 76: Modular Integration of Components V
Page 77 and 78: Sub-Sampling RF Channel Select Rece
Page 79 and 80: Direct Frequency Synthesis • Narr
Page 81 and 82: Integration of MEMS Resonators and
Page 83 and 84: CMOS Integrated Solutions • Monol
Page 85 and 86: MEMS Resonators for Chemical Sensin
Page 87 and 88: Competitive Advantages over Other N
Page 89 and 90: Comparison of M/NEMS Resonators •
Page 91 and 92: LOD From Rubiola’s tutorial on ph
Page 93 and 94: NEMS Beams as Chemical Sensors Rouk
Page 95 and 96: FBAR as Chemical Sensor Esteve, Cen
Page 97 and 98: CMR-S Scaling T LOD • Scaling equ
Page 99 and 100: 250 nm CMR-S Array with Oscillator
Page 101 and 102: Array of ss-DNA functionalized CMR-
Page 103 and 104: Concluding Remarks • M/NEMS reson
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