MEMS Resonators for Frequency Control and Sensing Applications

Acceleration Sensitivity
• Acceleration sensitivity, Γ, is an important aspect in limiting the use
of a mechanical oscillator. Γ measure the amounts of frequency shift
(in ppm) for every g of acceleration that is imparted to the structure.
• Low frequency vibrations (up to 5 KHz generally) cause shifts in the
resonator center frequency. Note that Γ is a vector quantity since it’ll
depend on the direction of acceleration
• These frequency shifts manifest as sidebands in the power
spectrum of an oscillator and significantly impact the phase noise of
the oscillator.
Image from Filler