MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
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CMUTs as <strong>MEMS</strong> Chemical Sensors<br />
Khuri-Yakub, Stan<strong>for</strong>d<br />
• 47 MHz device with low impedance <strong>and</strong> thin membrane. Despite<br />
lower Q the high power h<strong>and</strong>ling improves noise per<strong>for</strong>mance <strong>and</strong><br />
gives a LOD of 11 zg/µm 2<br />
• Low Q affects ckt power consumption (10s of mW)