MEMS Resonators for Frequency Control and Sensing Applications

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From Mechanical to Electrical Variables MECHANICAL VARIABLE ELECTRICAL ANALOGUE Force (F) Voltage (V) Velocity (v) Current (I) Compliance (1/keq) Capacitance (Cm) Damping (ceq) Resistance (Rm) Mass (meq) Inductance (Lm) • Mechanical variables can be made to correspond to equivalent electrical variables in order to model the behavior of a mechanical resonator with standard LCR parameters, for which well established electronic circuit design techniques already exist.
From Mechanical to Electrical Variables • Acoustic/MEMS resonators are generally used inside electronic components. Therefore the mechanical vibration (resonance) need to be transferred into an electrical signal. • A transducer is used to convert mechanical into electrical signal (and vice versa) so that the resonator can be directly interfaced with electronics. In the figure above the transducer is represented by a capacitor and a transformer with a turn ratio set by η (known as the electromechanical coupling; note that this is different from k t 2 which is also known as the electromechanical coupling coefficient)
Page 1 and 2: MEMS Resonators for Frequency Contr
Page 3 and 4: MEMS Resonators, RF Applications an
Page 5 and 6: MEMS Resonator Applications SAW/Qua
Page 7 and 8: RF MEMS Resonator Market Source: Yo
Page 9 and 10: Mode of Vibration and Frequency Mod
Page 11 and 12: Contour-Mode/Lamb-Wave Resonators T
Page 13: Shear Mode Resonators Quartz MEMS,
Page 17 and 18: Transduction of MEMS Resonators •
Page 19 and 20: Electrostatic Transduction Nguyen,
Page 21 and 22: Electrostrictive Transduction Dubus
Page 23 and 24: Thermal Transduction • Operation
Page 25 and 26: Piezoelectric Transduction complian
Page 27 and 28: Piezoelectric Transduction T=250 nm
Page 29 and 30: Equivalent Circuit: 1-port devices
Page 31 and 32: Equivalent Circuit: 2-port devices
Page 33 and 34: Eq. Ckt: MEMS Resonator vs. SAW/Qua
Page 35 and 36: Figure of Merit (FOM) of a Resonato
Page 37 and 38: MEMS Oscillators • MEMS Oscillato
Page 39 and 40: MEMS Oscillators • MEMS-based osc
Page 41 and 42: Pierce Oscillator: Design Example w
Page 47 and 48: Higher Frequency MEMS Oscillators
Page 49 and 50: Some Other MEMS Oscillators • MEM
Page 51 and 52: Temperature Compensation • Severa
Page 53 and 54: Acceleration Sensitivity • Accele
Page 55 and 56: Fully Integrated MEMS Oscillators
Page 57 and 58: Frequency Accuracy and Stability
Page 59 and 60: Filter Opportunities • IF Filters
Page 61 and 62: Electrically Coupled Filters • El
Page 63 and 64: Ladder Filters with Rectangular Pla
Page 65 and 66:
Filter Operation • Three Basic Re
Page 67 and 68:
Model Fitting Magnitude of S21 [dB]
Page 69 and 70:
Mechanical Coupling C M M M FBW3dB
Page 71 and 72:
Acoustic Coupling • Use of acoust
Page 73 and 74:
MEMS-Based RF Front-Ends: A Microsy
Page 75 and 76:
Modular Integration of Components V
Page 77 and 78:
Sub-Sampling RF Channel Select Rece
Page 79 and 80:
Direct Frequency Synthesis • Narr
Page 81 and 82:
Integration of MEMS Resonators and
Page 83 and 84:
CMOS Integrated Solutions • Monol
Page 85 and 86:
MEMS Resonators for Chemical Sensin
Page 87 and 88:
Competitive Advantages over Other N
Page 89 and 90:
Comparison of M/NEMS Resonators •
Page 91 and 92:
LOD From Rubiola’s tutorial on ph
Page 93 and 94:
NEMS Beams as Chemical Sensors Rouk
Page 95 and 96:
FBAR as Chemical Sensor Esteve, Cen
Page 97 and 98:
CMR-S Scaling T LOD • Scaling equ
Page 99 and 100:
250 nm CMR-S Array with Oscillator
Page 101 and 102:
Array of ss-DNA functionalized CMR-
Page 103 and 104:
Concluding Remarks • M/NEMS reson
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MEMS Resonators for Frequency Control and Sensing Applications

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