MEMS Resonators for Frequency Control and Sensing Applications

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Electrostrictive Transduction Weinstein & Bhave, Cornell • Create <strong>for</strong>ces in a solid dielectric by applying a fixed polarization voltage (biasing point). • Theory can be treated in a manner similar to electrostatic transduction in which the air gap is filled with a dielectric • The transducer can also be the resonant body or used to put into motion a mechanical element • Materials with high-K (dielectric constant) have been used to enhance the electromechanical coupling (silicon nitride, hafnium oxide, BST, BTO, STO)
Electrostrictive Transduction Dubus & Pascal, STO (FBAR-type) Resonator, Minatec/ST Micro • Qs are high as long as no metal layers are used • Highest f-Q product (~ 5e13) in <strong>MEMS</strong> resonator demonstrated via electrostrictive transduction (high impedance device in polysilicon) • As in the case of electrostatic transduction the k t 2 is low unless the entire device is made out of the transducer, but, in that case, Q tends to degrade significantly (few 100s) • Tunable via polarization voltage (relatively large) Mortazawi, BTO resonator, Michigan
Page 1 and 2: MEMS Resonators for Frequency Contr
Page 3 and 4: MEMS Resonators, RF Applications an
Page 5 and 6: MEMS Resonator Applications SAW/Qua
Page 7 and 8: RF MEMS Resonator Market Source: Yo
Page 9 and 10: Mode of Vibration and Frequency Mod
Page 11 and 12: Contour-Mode/Lamb-Wave Resonators T
Page 13 and 14: Shear Mode Resonators Quartz MEMS,
Page 15 and 16: From Mechanical to Electrical Varia
Page 17 and 18: Transduction of MEMS Resonators •
Page 19: Electrostatic Transduction Nguyen,
Page 23 and 24: Thermal Transduction • Operation
Page 25 and 26: Piezoelectric Transduction complian
Page 27 and 28: Piezoelectric Transduction T=250 nm
Page 29 and 30: Equivalent Circuit: 1-port devices
Page 31 and 32: Equivalent Circuit: 2-port devices
Page 33 and 34: Eq. Ckt: MEMS Resonator vs. SAW/Qua
Page 35 and 36: Figure of Merit (FOM) of a Resonato
Page 37 and 38: MEMS Oscillators • MEMS Oscillato
Page 39 and 40: MEMS Oscillators • MEMS-based osc
Page 41 and 42: Pierce Oscillator: Design Example w
Page 47 and 48: Higher Frequency MEMS Oscillators
Page 49 and 50: Some Other MEMS Oscillators • MEM
Page 51 and 52: Temperature Compensation • Severa
Page 53 and 54: Acceleration Sensitivity • Accele
Page 55 and 56: Fully Integrated MEMS Oscillators
Page 57 and 58: Frequency Accuracy and Stability
Page 59 and 60: Filter Opportunities • IF Filters
Page 61 and 62: Electrically Coupled Filters • El
Page 63 and 64: Ladder Filters with Rectangular Pla
Page 65 and 66: Filter Operation • Three Basic Re
Page 67 and 68: Model Fitting Magnitude of S21 [dB]
Page 69 and 70: Mechanical Coupling C M M M FBW3dB
Page 71 and 72:
Acoustic Coupling • Use of acoust
Page 73 and 74:
MEMS-Based RF Front-Ends: A Microsy
Page 75 and 76:
Modular Integration of Components V
Page 77 and 78:
Sub-Sampling RF Channel Select Rece
Page 79 and 80:
Direct Frequency Synthesis • Narr
Page 81 and 82:
Integration of MEMS Resonators and
Page 83 and 84:
CMOS Integrated Solutions • Monol
Page 85 and 86:
MEMS Resonators for Chemical Sensin
Page 87 and 88:
Competitive Advantages over Other N
Page 89 and 90:
Comparison of M/NEMS Resonators •
Page 91 and 92:
LOD From Rubiola’s tutorial on ph
Page 93 and 94:
NEMS Beams as Chemical Sensors Rouk
Page 95 and 96:
FBAR as Chemical Sensor Esteve, Cen
Page 97 and 98:
CMR-S Scaling T LOD • Scaling equ
Page 99 and 100:
250 nm CMR-S Array with Oscillator
Page 101 and 102:
Array of ss-DNA functionalized CMR-
Page 103 and 104:
Concluding Remarks • M/NEMS reson
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MEMS Resonators for Frequency Control and Sensing Applications

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