MEMS Resonators for Frequency Control and Sensing Applications

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250 nm Thick AlN CMR-S R s C m Equivalent Circuit: L m C 0 R m C m=54.9 fF L m=14.5 µH R m=16 Ω C 0=3.4 pF R s=28 Ω Q m ≈ 1000 k t 2 ≈ 2%
250 nm CMR-S Array with Oscillator CMR-S array is connected to a single Pierce oscillator via CMOS switches. Output is monitored by time multiplexing through the various resonators [Rinaldi, et al., <strong>MEMS</strong> 2011/Sensors 2010]
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MEMS Resonators for Frequency Contr
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MEMS Resonators, RF Applications an
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MEMS Resonator Applications SAW/Qua
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RF MEMS Resonator Market Source: Yo
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Mode of Vibration and Frequency Mod
Page 11 and 12:
Contour-Mode/Lamb-Wave Resonators T
Page 13 and 14:
Shear Mode Resonators Quartz MEMS,
Page 15 and 16:
From Mechanical to Electrical Varia
Page 17 and 18:
Transduction of MEMS Resonators •
Page 19 and 20:
Electrostatic Transduction Nguyen,
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Electrostrictive Transduction Dubus
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Thermal Transduction • Operation
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Piezoelectric Transduction complian
Page 27 and 28:
Piezoelectric Transduction T=250 nm
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Equivalent Circuit: 1-port devices
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Equivalent Circuit: 2-port devices
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Eq. Ckt: MEMS Resonator vs. SAW/Qua
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Figure of Merit (FOM) of a Resonato
Page 37 and 38:
MEMS Oscillators • MEMS Oscillato
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MEMS Oscillators • MEMS-based osc
Page 41 and 42:
Pierce Oscillator: Design Example w
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Page 45 and 46:
Page 47 and 48: Higher Frequency MEMS Oscillators
Page 49 and 50: Some Other MEMS Oscillators • MEM
Page 51 and 52: Temperature Compensation • Severa
Page 53 and 54: Acceleration Sensitivity • Accele
Page 55 and 56: Fully Integrated MEMS Oscillators
Page 57 and 58: Frequency Accuracy and Stability
Page 59 and 60: Filter Opportunities • IF Filters
Page 61 and 62: Electrically Coupled Filters • El
Page 63 and 64: Ladder Filters with Rectangular Pla
Page 65 and 66: Filter Operation • Three Basic Re
Page 67 and 68: Model Fitting Magnitude of S21 [dB]
Page 69 and 70: Mechanical Coupling C M M M FBW3dB
Page 71 and 72: Acoustic Coupling • Use of acoust
Page 73 and 74: MEMS-Based RF Front-Ends: A Microsy
Page 75 and 76: Modular Integration of Components V
Page 77 and 78: Sub-Sampling RF Channel Select Rece
Page 79 and 80: Direct Frequency Synthesis • Narr
Page 81 and 82: Integration of MEMS Resonators and
Page 83 and 84: CMOS Integrated Solutions • Monol
Page 85 and 86: MEMS Resonators for Chemical Sensin
Page 87 and 88: Competitive Advantages over Other N
Page 89 and 90: Comparison of M/NEMS Resonators •
Page 91 and 92: LOD From Rubiola’s tutorial on ph
Page 93 and 94: NEMS Beams as Chemical Sensors Rouk
Page 95 and 96: FBAR as Chemical Sensor Esteve, Cen
Page 97: CMR-S Scaling T LOD • Scaling equ
Page 101 and 102: Array of ss-DNA functionalized CMR-
Page 103 and 104: Concluding Remarks • M/NEMS reson
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MEMS Resonators for Frequency Control and Sensing Applications

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