MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
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Temperature Effects in <strong>MEMS</strong> Oscillators<br />
• Most <strong>MEMS</strong> resonators made out of thin-film or silicon suffer from<br />
frequency shifts induced by temperature variations. This is known as<br />
temperature coefficient of frequency (TCF) <strong>and</strong> has a significant<br />
impact on the per<strong>for</strong>mance of an oscillator<br />
• Most materials tend to soften (young’s modulus decreases) with<br />
temperature. This is the main source of TCF (plus material expansion).<br />
Most of <strong>MEMS</strong> resonators have TCF of – 10 to – 50 ppm/K<br />
Young’s<br />
modulus<br />
Volume<br />
• Quartz has special cuts in<br />
which the TCF is practically<br />
zero<br />
-25 ppm/K<br />
-AlN CMR
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