MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
MEMS Resonators for Frequency Control and Sensing Applications
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<strong>MEMS</strong> Resonator Design<br />
<strong>and</strong> Transduction<br />
• Classification of <strong>MEMS</strong> resonators based on mode of<br />
vibration<br />
• General equivalent electrical model: from mechanical to<br />
electrical parameters<br />
• <strong>MEMS</strong> resonator transduction <strong>and</strong> figure of merit
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