MEMS Resonators for Frequency Control and Sensing Applications

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Electrical Coupling w/ Device Cap 3 rd order filter as an example • Electrical Coupling using Intrinsic C 0 C M R M L M C 0 C 0 C 0 C f C M R M L M C 0 C M R M L M Coupling elements are intrinsic capacitors of the resonators C 0 C 0
Filter Operation • Three Basic Resonance Modes 2C 0 |S 21| 2C 0 i fs f s f s CM 1+ 2C 0 1 1 = 2π C L M M 2C 0 2C 0 i1 i 3 i 1 f s 2C 0/3 3C 1+ 2C M 0 i 2 4C 0/3 4C 0/3 f 2C 0/3 i 3
Page 1 and 2:
MEMS Resonators for Frequency Contr
Page 3 and 4:
MEMS Resonators, RF Applications an
Page 5 and 6:
MEMS Resonator Applications SAW/Qua
Page 7 and 8:
RF MEMS Resonator Market Source: Yo
Page 9 and 10:
Mode of Vibration and Frequency Mod
Page 11 and 12:
Contour-Mode/Lamb-Wave Resonators T
Page 13 and 14: Shear Mode Resonators Quartz MEMS,
Page 15 and 16: From Mechanical to Electrical Varia
Page 17 and 18: Transduction of MEMS Resonators •
Page 19 and 20: Electrostatic Transduction Nguyen,
Page 21 and 22: Electrostrictive Transduction Dubus
Page 23 and 24: Thermal Transduction • Operation
Page 25 and 26: Piezoelectric Transduction complian
Page 27 and 28: Piezoelectric Transduction T=250 nm
Page 29 and 30: Equivalent Circuit: 1-port devices
Page 31 and 32: Equivalent Circuit: 2-port devices
Page 33 and 34: Eq. Ckt: MEMS Resonator vs. SAW/Qua
Page 35 and 36: Figure of Merit (FOM) of a Resonato
Page 37 and 38: MEMS Oscillators • MEMS Oscillato
Page 39 and 40: MEMS Oscillators • MEMS-based osc
Page 41 and 42: Pierce Oscillator: Design Example w
Page 47 and 48: Higher Frequency MEMS Oscillators
Page 49 and 50: Some Other MEMS Oscillators • MEM
Page 51 and 52: Temperature Compensation • Severa
Page 53 and 54: Acceleration Sensitivity • Accele
Page 55 and 56: Fully Integrated MEMS Oscillators
Page 57 and 58: Frequency Accuracy and Stability
Page 59 and 60: Filter Opportunities • IF Filters
Page 61 and 62: Electrically Coupled Filters • El
Page 63: Ladder Filters with Rectangular Pla
Page 67 and 68: Model Fitting Magnitude of S21 [dB]
Page 69 and 70: Mechanical Coupling C M M M FBW3dB
Page 71 and 72: Acoustic Coupling • Use of acoust
Page 73 and 74: MEMS-Based RF Front-Ends: A Microsy
Page 75 and 76: Modular Integration of Components V
Page 77 and 78: Sub-Sampling RF Channel Select Rece
Page 79 and 80: Direct Frequency Synthesis • Narr
Page 81 and 82: Integration of MEMS Resonators and
Page 83 and 84: CMOS Integrated Solutions • Monol
Page 85 and 86: MEMS Resonators for Chemical Sensin
Page 87 and 88: Competitive Advantages over Other N
Page 89 and 90: Comparison of M/NEMS Resonators •
Page 91 and 92: LOD From Rubiola’s tutorial on ph
Page 93 and 94: NEMS Beams as Chemical Sensors Rouk
Page 95 and 96: FBAR as Chemical Sensor Esteve, Cen
Page 97 and 98: CMR-S Scaling T LOD • Scaling equ
Page 99 and 100: 250 nm CMR-S Array with Oscillator
Page 101 and 102: Array of ss-DNA functionalized CMR-
Page 103 and 104: Concluding Remarks • M/NEMS reson
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MEMS Resonators for Frequency Control and Sensing Applications

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