Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...

More documents

Recommendations

Info

Issued by Sandia National Laboratories, operated for the United States Department of Energy by Sandia Corporation. NOTICE: This report was prepared as an account of work sponsored by an agency of the United States Government. Neither the United States Govern-ment nor any agency thereof, nor any of their employees, nor any of their contractors, subcontractors, or their employees, makes any warranty,express or implied, or assumes any legal liability or responsibility for the accuracy, completeness, or usefulness of any information, apparatus, product, or process disclosed, or represents that its use would not infringe privately owned rights. Reference herein to any specific commercial product, process, or service by trade name, trademark, manufacturer, or otherwise, does not necessarily constitute or imply its endorsement, recommendation,or favoring by the United States Government, any agency thereof, or any of their contractors or subcontractors. The views and opinions expressedherein do not necessarily state or reflect those of the United States Govern-ment, any agency thereof, or any of their contractors. Printed in the United States of America. This report has been reproduced directly from the best available copy. Available to DOE and DOE contractors from U.S. Department of Energy Office of Scientific and Technical Information P.O. Box 62 Oak Ridge, TN 37831 Telephone: (865)576-8401 Facsimile: (865)576-5728 E-Mail: reports@adonis.osti.gov Online ordering: http://www.doe.gov/bridge Available to the public from U.S. Department of Commerce National Technical Information Service 5285 Port Royal Rd Springfield, VA 22161 Telephone: (800)553-6847 Facsimile: (703)605-6900 E-Mail: orders@ntis.fedworld.gov Online order: http://www.ntis.gov/ordering.htm 2
SAND2004-1319 Unlimited Release Printed April 2004 Mechanics and Tribology of MEMS Materials Michael T. Dugger, Brad L. Boyce, Thomas E. Buchheit, and Somuri V. Prasad Microsystem Materials, Tribology and Technology Department Sandia National Laboratories P.O. Box 5800 Albuquerque, NM 87185-0889 Abstract Micromachines have the potential to significantly impact future weapon component designs as well as other defense, industrial, and consumer product applications. For both electroplated (LIGA) and surface micromachined (SMM) structural elements, the influence of processing on structure, and the resultant effects on material properties are not well understood. The behavior of dynamic interfaces in present as-fabricated microsystem materials is inadequate for most applications and the fundamental relationships between processing conditions and tribological behavior in these systems are not clearly defined. We intend to develop a basic understanding of deformation, fracture, and surface interactions responsible for friction and wear of microelectromechanical system (MEMS) materials. This will enable needed design flexibility for these devices, as well as strengthen our understanding of material behavior at the nanoscale. The goal of this project is to develop new capabilities for sub-microscale mechanical and tribological measurements, and to exercise these capabilities to investigate material behavior at this size scale. 3
Page 1: SANDIA REPORT SAND2004-1319 Unlimit
Page 5 and 6: Contents ACKNOWLEDGEMENTS..........
Page 7 and 8: 6.5 Summary........................
Page 9 and 10: List of Figures Figure 1.1 SEM micr
Page 11 and 12: Figure 6.2 Contact between an elast
Page 13 and 14: Preface Our team was involved in a
Page 15 and 16: strength. The subsequent chapter di
Page 17 and 18: Fig. 1.3. SEM image of cylindrical
Page 19 and 20: Fig. 1.5. Schematic of primary feat
Page 21 and 22: Fig 1.7 Double-hinged pull-tab tens
Page 23 and 24: Fig 1.10. SEM image of optical forc
Page 25 and 26: 2 Strength Distributions in SUMMiT
Page 27 and 28: 2.2 Critical Flaw Size Evaluation T
Page 29 and 30: Fig. 2.5. SEM micrograph of pull-ta
Page 31 and 32: (1) Differences in surface roughnes
Page 33 and 34: 3 The Role Of Microstructure In SUM
Page 35 and 36: crystallographic orientation of a g
Page 37 and 38: direction. Also, maximum stress loc
Page 39 and 40: 3.4 References 3.1 Randle, V., Micr
Page 41 and 42: has the advantage of distributing t
Page 43 and 44: and servovalve at a strain rate of
Page 45 and 46: 4.6 References 4.1. TJ Garino, AM M
Page 47 and 48: microscopy studies. As a first step
Page 49 and 50: Fig. 5.2. Orientation imaging of a
Page 51 and 52: Fig. 5.5. Orientation imaging of a
Page 53 and 54:
6 Novel Techniques for Measurement
Page 55 and 56:
of adhesion, and, (iv) a smaller co
Page 57 and 58:
Force (mN) Fig. 6.5. Typical load-d
Page 59 and 60:
7 Impact of Silane Degradation Due
Page 61 and 62:
All samples were coated with alkyls
Page 63 and 64:
the friction structure and the cali
Page 65 and 66:
7.4 RESULTS 7.4.1 Simulation of dos
Page 67 and 68:
Dose (MeV/g) Fig. 7.4. Results of X
Page 69 and 70:
heating on contact angle for PFTS.
Page 71 and 72:
the C-C backbone of the PFTS molecu
Page 73 and 74:
The increase in static friction for
Page 75 and 76:
8 Friction and Wear of Selective Tu
Page 77 and 78:
During processing of microelectrome
Page 79 and 80:
actuator. After unloading, the devi
Page 81 and 82:
9 Conclusions and Recommendations T
Page 83:
10 Distribution 3 MS 0889 M.T. Dugg
show all

Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...

Create successful ePaper yourself

Delete template?

Save as template?