Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...

More documents

Recommendations

Info

Acknowledgements The authors thank the management of Research Foundations programs in Center 1800 for supporting the development of the friction measurement infrastructure used in this project. We also thank the personnel of the Microelectronics Development Laboratory for fabricating the MEMS structures used in this work. Finally, we thank the LDRD program office for the opportunity to explore the mechanical behavior, friction and wear behavior of materials for microsystem applications. 4
Contents ACKNOWLEDGEMENTS..............................................................................................4 PREFACE ....................................................................................................................13 1 DEVELOPMENT OF IMPROVED MECHANICAL TEST CAPABILITIES FOR SMM MATERIALS ................................................................................................................14 1.1 Background on MEMS Strength Evaluation ..............................................................14 1.2 Improvement of MEMS Tensile Strength Evaluation Methodology ........................15 1.3 Development of a MEMS Mechanical Probe Station.................................................18 1.4 Development of next-generation SMM mechanical test structures and on-chip force/displacement sensors........................................................................................................19 1.4.1 Pull-tab tensile specimens........................................................................................20 1.4.2 Fracture-toughness structures. .................................................................................21 1.4.3 Bend strength structures...........................................................................................22 1.4.4 Optical force transducer...........................................................................................22 1.5 References.......................................................................................................................23 2 STRENGTH DISTRIBUTIONS IN SUMMIT TM SMM POLYSILICON....................25 2.1 Weibull Analysis of Strength Distributions in SUMMiT TM Polysilicon ...................25 2.2 Critical Flaw Size Evaluation .......................................................................................27 2.3 Size-Dependence in Polysilicon Strength.....................................................................28 2.4 Layer Dependence on Strength.....................................................................................30 2.5 References.......................................................................................................................32 3 THE ROLE OF MICROSTRUCTURE IN SUMMIT TM POLYSILICON FAILURE ..33 3.1 Characterization of Polysilicon Microstructure .........................................................33 3.2 Simulating the Response of Polycrystalline Silicon ....................................................34 3.2.1 Simulation Procedure...............................................................................................34 3.2.2 Results and Discussion ............................................................................................35 5
Page 1 and 2: SANDIA REPORT SAND2004-1319 Unlimit
Page 3: SAND2004-1319 Unlimited Release Pri
Page 7 and 8: 6.5 Summary........................
Page 9 and 10: List of Figures Figure 1.1 SEM micr
Page 11 and 12: Figure 6.2 Contact between an elast
Page 13 and 14: Preface Our team was involved in a
Page 15 and 16: strength. The subsequent chapter di
Page 17 and 18: Fig. 1.3. SEM image of cylindrical
Page 19 and 20: Fig. 1.5. Schematic of primary feat
Page 21 and 22: Fig 1.7 Double-hinged pull-tab tens
Page 23 and 24: Fig 1.10. SEM image of optical forc
Page 25 and 26: 2 Strength Distributions in SUMMiT
Page 27 and 28: 2.2 Critical Flaw Size Evaluation T
Page 29 and 30: Fig. 2.5. SEM micrograph of pull-ta
Page 31 and 32: (1) Differences in surface roughnes
Page 33 and 34: 3 The Role Of Microstructure In SUM
Page 35 and 36: crystallographic orientation of a g
Page 37 and 38: direction. Also, maximum stress loc
Page 39 and 40: 3.4 References 3.1 Randle, V., Micr
Page 41 and 42: has the advantage of distributing t
Page 43 and 44: and servovalve at a strain rate of
Page 45 and 46: 4.6 References 4.1. TJ Garino, AM M
Page 47 and 48: microscopy studies. As a first step
Page 49 and 50: Fig. 5.2. Orientation imaging of a
Page 51 and 52: Fig. 5.5. Orientation imaging of a
Page 53 and 54: 6 Novel Techniques for Measurement
Page 55 and 56:
of adhesion, and, (iv) a smaller co
Page 57 and 58:
Force (mN) Fig. 6.5. Typical load-d
Page 59 and 60:
7 Impact of Silane Degradation Due
Page 61 and 62:
All samples were coated with alkyls
Page 63 and 64:
the friction structure and the cali
Page 65 and 66:
7.4 RESULTS 7.4.1 Simulation of dos
Page 67 and 68:
Dose (MeV/g) Fig. 7.4. Results of X
Page 69 and 70:
heating on contact angle for PFTS.
Page 71 and 72:
the C-C backbone of the PFTS molecu
Page 73 and 74:
The increase in static friction for
Page 75 and 76:
8 Friction and Wear of Selective Tu
Page 77 and 78:
During processing of microelectrome
Page 79 and 80:
actuator. After unloading, the devi
Page 81 and 82:
9 Conclusions and Recommendations T
Page 83:
10 Distribution 3 MS 0889 M.T. Dugg
show all

Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?