Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...

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variety of radii of curvature were fabricated and pressed into contact with a metallographically polished LIGA Ni disk. Load-displacement curves for these experiments showed negative loads in the unloading segments. This negative load or pull-off force allows us to quantify the adhesion forces between surfaces after removal of the applied load. Alkylsilane monolayers were found to degrade upon exposure to water vapor at elevated temperatures, but not for exposures of up to an hour to elevated temperature in dry conditions. Selective tungsten appears to be an attractive surface treatment option for MEMS with sliding surfaces. Controlled passivation of tungsten-coated surfaces may allow creation of wear resistant, low friction, and chemically stable surfaces. Strength reduction due to wormhole formation would require process modification, or structures designed to accommodate the lower tensile strength. 82
10 Distribution 3 MS 0889 M.T. Dugger, 1851 3 0889 T.E. Buchheit, 1851 3 0889 B.L. Boyce, 1851 3 0889 S.V. Prasad, 1851 1 0889 J.S. Custer, 1851 1 1084 P.J. Clews, 1746 1 1084 M.G. Hankins, 1746 1 1310 D. Tanner, 1762 1 1310 M.P. DeBoer, 1762 1 9401 J.J. Kelly, 8753 1 1425 W.G. Yelton, 1743 1 0188 LDRD Office, 1030 1 9018 Central Technical Files, 8945-1 2 0899 Technical Library, 9616 83
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SANDIA REPORT SAND2004-1319 Unlimit
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SAND2004-1319 Unlimited Release Pri
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Contents ACKNOWLEDGEMENTS..........
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6.5 Summary........................
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List of Figures Figure 1.1 SEM micr
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Figure 6.2 Contact between an elast
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Preface Our team was involved in a
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strength. The subsequent chapter di
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Fig. 1.3. SEM image of cylindrical
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Fig. 1.5. Schematic of primary feat
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Fig 1.7 Double-hinged pull-tab tens
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Fig 1.10. SEM image of optical forc
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2 Strength Distributions in SUMMiT
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2.2 Critical Flaw Size Evaluation T
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Fig. 2.5. SEM micrograph of pull-ta
Page 31 and 32: (1) Differences in surface roughnes
Page 33 and 34: 3 The Role Of Microstructure In SUM
Page 35 and 36: crystallographic orientation of a g
Page 37 and 38: direction. Also, maximum stress loc
Page 39 and 40: 3.4 References 3.1 Randle, V., Micr
Page 41 and 42: has the advantage of distributing t
Page 43 and 44: and servovalve at a strain rate of
Page 45 and 46: 4.6 References 4.1. TJ Garino, AM M
Page 47 and 48: microscopy studies. As a first step
Page 49 and 50: Fig. 5.2. Orientation imaging of a
Page 51 and 52: Fig. 5.5. Orientation imaging of a
Page 53 and 54: 6 Novel Techniques for Measurement
Page 55 and 56: of adhesion, and, (iv) a smaller co
Page 57 and 58: Force (mN) Fig. 6.5. Typical load-d
Page 59 and 60: 7 Impact of Silane Degradation Due
Page 61 and 62: All samples were coated with alkyls
Page 63 and 64: the friction structure and the cali
Page 65 and 66: 7.4 RESULTS 7.4.1 Simulation of dos
Page 67 and 68: Dose (MeV/g) Fig. 7.4. Results of X
Page 69 and 70: heating on contact angle for PFTS.
Page 71 and 72: the C-C backbone of the PFTS molecu
Page 73 and 74: The increase in static friction for
Page 75 and 76: 8 Friction and Wear of Selective Tu
Page 77 and 78: During processing of microelectrome
Page 79 and 80: actuator. After unloading, the devi
Page 81: 9 Conclusions and Recommendations T
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