Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...
Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...
Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...
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<strong>and</strong> servovalve at a strain rate <strong>of</strong> ~10 -3 . A laser extensometer was used to provide non-contact<br />
displacement data between two integral tabs at either end <strong>of</strong> the gage section.<br />
Fig. 4.4. Optical micrograph <strong>of</strong> a powder-consolidated <strong>MEMS</strong> tensile specimen. Scale is in mm.<br />
The tabs extending from the gage section were incorporated for strain measurement<br />
using a transmission laser micrometer.<br />
4.5 Tensile Behavior <strong>of</strong> Stainless Steel Parts<br />
The room-temperature stress-strain behavior <strong>of</strong> the consolidated Stainless Steel powder is<br />
shown in Fig. 4.5. The 0.2% <strong>of</strong>fset yield strength was measured at 395 MPa <strong>and</strong> the ultimate<br />
tensile strength was 635 MPa. The stainless steel parts showed ~17% elongation <strong>and</strong> ~21%<br />
reduction in area prior to failure. The powder micromold material was higher in strength than<br />
conventional wrought 316 stainless steel which typically exhibits a yield strength <strong>of</strong> 200-300<br />
MPa <strong>and</strong> an ultimate tensile strength <strong>of</strong> 500-600 MPa. Concomitantly, the ductility was lower in<br />
the powder micromold material compared to wrought 316 stainless steel which can exhibit more<br />
than 30% elongation. The powder micromold material also showed higher yield <strong>and</strong> tensile<br />
strengths <strong>and</strong> lower ductility than is typically reported for conventional powder-processed 316L<br />
material (yield ~200 MPa, ultimate tensile strength ~500 MPa, ~30% elongation). This may be<br />
due at least in part to the relatively small size <strong>of</strong> the starting powder particle, <strong>and</strong> resulting<br />
increase in oxide <strong>and</strong> impurity incorporation. From a design perspective the relatively high<br />
strength exhibited by the powder-processed micromold material is quite favorable, <strong>and</strong> the<br />
ductility, while reduced, is still in a very usable range.<br />
The mechanical properties <strong>of</strong> the Ni, shown in Fig. 4.6, were dependent on the sintering<br />
temperature <strong>and</strong> ranged from a high yield strength (350 MPa) <strong>and</strong> a low ductility (3%) at 600°C<br />
to a low yield strength (200 MPa) <strong>and</strong> a high ductility (45%) at 800°C. This trend is thought to<br />
be associated with Hall-Petch grain size dependence, as the higher sintering temperatures<br />
resulted in substantially coarser microstructure.<br />
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