Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...
Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...
Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...
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measurements, the TLDs were packaged within aluminum “equilibrators” 2.29×10 -3 m thick. By<br />
surrounding the TLD with a thickness <strong>of</strong> material (Al) whose radiation-scattering properties are<br />
similar to CaF2, the dose measured by the TLD was not influenced by electron redistribution.<br />
Experiments were simulated using the S<strong>and</strong>ia-developed ADEPT one-dimensional radiation<br />
transport code. ADEPT is a coupled electron-photon transport code, <strong>and</strong> has been subjected to<br />
extensive experimental validation. The simulations verified that our TLD equilibration scheme<br />
was adequate <strong>and</strong> that attenuation through the TLDs <strong>and</strong> the Pyrex tubes was minimal. The<br />
expected accuracy <strong>of</strong> the TLD dose measurements is ±10% at the 50 krad level <strong>and</strong> ±13% at the<br />
500 krad level. The doses measured from the exposures were within this uncertainty margin <strong>of</strong><br />
the nominal values <strong>of</strong> 50 <strong>and</strong> 500 krad.<br />
The samples were positioned close to the radiation source, <strong>and</strong> the fall<strong>of</strong>f in dose rate with<br />
distance from the source was ignored. The radiation field for the source configuration at GIF has<br />
been independently mapped. Based on those measurements, a worst case <strong>of</strong> 8% fall<strong>of</strong>f in dose<br />
rate between the positions <strong>of</strong> the TLDs <strong>and</strong> the samples is expected. This figure is within the<br />
margin <strong>of</strong> accuracy <strong>of</strong> the TLDs.<br />
Different elements have different probabilities <strong>of</strong> interacting with photons, <strong>and</strong> in the<br />
same photon environment will absorb different doses. For the high photon energies (>1 MeV)<br />
characteristic <strong>of</strong> GIF, photon-solid interactions are dominated by the Compton effect. The<br />
absorption coefficient for Compton scattering, when normalized by density, varies as (atomic<br />
number)/(atomic weight), which is roughly constant (0.4-0.5) for elements other than hydrogen.<br />
Thus, the doses absorbed by different materials at GIF are similar. Silicon is typically used as a<br />
common “reference material” for dose measurements. For the GIF environment, the equilibrium<br />
dose <strong>of</strong> silicon is 2% greater than that <strong>of</strong> CaF2, which is well within the accuracy <strong>of</strong> the TLDs.<br />
7.3.7 Thermal exposures<br />
Samples for thermal exposure were placed in a preheated furnace at 300°C for a specified<br />
time. Those exposed to this heat treatment in the same internal environments as the radiation<br />
exposures were heated inside the sealed vacuum tubes as described above. Heat treatment in<br />
ambient atmosphere involved placing the same number <strong>of</strong> specimens as in the vacuum tubes in a<br />
covered glass petri dish. In all cases, the furnace returned to the preset temperature within a<br />
minute <strong>of</strong> loading the samples, <strong>and</strong> after removal from the furnace the samples were allowed to<br />
air-cool to room temperature. For samples exposed to atmosphere, the ambient relative humidity<br />
was 13%, creating a water vapor concentration <strong>of</strong> 4261 ppm under these conditions. The set <strong>of</strong><br />
samples for thermal exposures is summarized in Table 7.2.<br />
Table 7.2: Matrix <strong>of</strong> samples for thermal exposures<br />
Coating<br />
ODTS<br />
PFTS<br />
Time at 300°C,<br />
min.<br />
64<br />
Atmosphere<br />
60 N2<br />
10 Dry air<br />
10 13% RH air<br />
60 N2<br />
10 Dry air<br />
10 13% RH air