Mechanics and Tribology of MEMS Materials - prod.sandia.gov ...

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3.3 Summary.........................................................................................................................38 3.4 References.......................................................................................................................39 4 POWDER-CONSOLIDATED MEMS DEVELOPMENT ........................................40 4.1 Background ....................................................................................................................40 4.2 Method for Evaluating Flexural Strength of Alumina Parts.....................................40 4.3 Results from Flexural Strength Test of Alumina........................................................41 4.4 Method of Evaluating Tensile Behavior of Consolidated Metallic Materials ..........42 4.5 Tensile Behavior of Stainless Steel Parts .....................................................................43 4.6 References.......................................................................................................................45 5 EBSD STUDIES OF WEAR-INDUCED SUBSURFACES IN ELECTROFORMED NICKEL........................................................................................................................46 5.1 Background ....................................................................................................................46 5.2 Introduction....................................................................................................................46 5.3 Experimental ..................................................................................................................47 5.3.1 Specimen preparation ..............................................................................................47 5.3.2 Tribology Testing ....................................................................................................47 5.3.3 Sample Preparation by Focused Ion Beam (FIB) ....................................................47 5.3.4 Electron Backscatter Diffraction Analysis ..............................................................47 5.4 Results and Discussion...................................................................................................48 5.5 Summary and Conclusions ...........................................................................................51 5.6 References.......................................................................................................................52 6 NOVEL TECHNIQUES FOR MEASUREMENT OF ADHESION IN LIGA CONTACTS .................................................................................................................53 6.1 Introduction....................................................................................................................53 6.2 A Review of Analytical Models.....................................................................................54 6.3 Morphology of LIGA Fabricated Structures ..............................................................55 6.4 LIGA Adhesion Probe Tips and Pull-Off Force Measurements ...............................56 6
6.5 Summary.........................................................................................................................57 6.6 References.......................................................................................................................57 7 IMPACT OF SILANE DEGRADATION DUE TO WATER VAPOR AND RADIATION EXPOSURE ON TRIBOLOGICAL BEHAVIOR ......................................59 7.1 ABSTRACT....................................................................................................................59 7.2 INTRODUCTION..........................................................................................................59 7.3 EXPERIMENTAL APPROACH .................................................................................60 7.3.1 Sample types and monolayer deposition .................................................................60 7.3.2 Monolayer characterization .....................................................................................61 7.3.3 Friction measurements.............................................................................................62 7.3.4 Description of radiation exposure facility ...............................................................63 7.3.5 Radiation exposures.................................................................................................63 7.3.6 Dose measurement...................................................................................................63 7.3.7 Thermal exposures...................................................................................................64 7.4 RESULTS .......................................................................................................................65 7.4.1 Simulation of dose delivered at GIF ........................................................................65 7.4.2 Simulation of dose delivered during XPS analysis..................................................65 7.4.3 Contact angle ...........................................................................................................67 7.4.4 Chemical analysis ....................................................................................................69 7.4.5 Friction measurements.............................................................................................71 7.5 DISCUSSION .................................................................................................................72 7.6 CONCLUSIONS ............................................................................................................73 7.7 ACKNOWLEDGEMENTS ..........................................................................................73 7.8 REFERENCES...............................................................................................................74 8 FRICTION AND WEAR OF SELECTIVE TUNGSTEN COATINGS FOR SURFACE MICROMACHINED SILICON DEVICES......................................................................75 8.1 Introduction....................................................................................................................75 8.2 Experimental Approach ................................................................................................75 8.2.1 Treatment of SMM devices with selective tungsten................................................75 8.2.2 Surface Chemical Analysis......................................................................................75 8.2.3 Tribological Measurements of Tungsten-Coated Surfaces......................................76 8.3 Results and Discussion...................................................................................................76 7
Page 1 and 2: SANDIA REPORT SAND2004-1319 Unlimit
Page 3 and 4: SAND2004-1319 Unlimited Release Pri
Page 5: Contents ACKNOWLEDGEMENTS..........
Page 9 and 10: List of Figures Figure 1.1 SEM micr
Page 11 and 12: Figure 6.2 Contact between an elast
Page 13 and 14: Preface Our team was involved in a
Page 15 and 16: strength. The subsequent chapter di
Page 17 and 18: Fig. 1.3. SEM image of cylindrical
Page 19 and 20: Fig. 1.5. Schematic of primary feat
Page 21 and 22: Fig 1.7 Double-hinged pull-tab tens
Page 23 and 24: Fig 1.10. SEM image of optical forc
Page 25 and 26: 2 Strength Distributions in SUMMiT
Page 27 and 28: 2.2 Critical Flaw Size Evaluation T
Page 29 and 30: Fig. 2.5. SEM micrograph of pull-ta
Page 31 and 32: (1) Differences in surface roughnes
Page 33 and 34: 3 The Role Of Microstructure In SUM
Page 35 and 36: crystallographic orientation of a g
Page 37 and 38: direction. Also, maximum stress loc
Page 39 and 40: 3.4 References 3.1 Randle, V., Micr
Page 41 and 42: has the advantage of distributing t
Page 43 and 44: and servovalve at a strain rate of
Page 45 and 46: 4.6 References 4.1. TJ Garino, AM M
Page 47 and 48: microscopy studies. As a first step
Page 49 and 50: Fig. 5.2. Orientation imaging of a
Page 51 and 52: Fig. 5.5. Orientation imaging of a
Page 53 and 54: 6 Novel Techniques for Measurement
Page 55 and 56: of adhesion, and, (iv) a smaller co
Page 57 and 58:
Force (mN) Fig. 6.5. Typical load-d
Page 59 and 60:
7 Impact of Silane Degradation Due
Page 61 and 62:
All samples were coated with alkyls
Page 63 and 64:
the friction structure and the cali
Page 65 and 66:
7.4 RESULTS 7.4.1 Simulation of dos
Page 67 and 68:
Dose (MeV/g) Fig. 7.4. Results of X
Page 69 and 70:
heating on contact angle for PFTS.
Page 71 and 72:
the C-C backbone of the PFTS molecu
Page 73 and 74:
The increase in static friction for
Page 75 and 76:
8 Friction and Wear of Selective Tu
Page 77 and 78:
During processing of microelectrome
Page 79 and 80:
actuator. After unloading, the devi
Page 81 and 82:
9 Conclusions and Recommendations T
Page 83:
10 Distribution 3 MS 0889 M.T. Dugg
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