Edwards iH Dry Pumping Systems, iH80, iH600, iH1000
Edwards iH Dry Pumping Systems, iH80, iH600, iH1000
Edwards iH Dry Pumping Systems, iH80, iH600, iH1000
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Switch on<br />
▲<br />
SELECT PUMP<br />
Process pump<br />
ENTER<br />
▲<br />
▼<br />
SELECT PUMP<br />
Load lock pump<br />
▲<br />
SELECT PUMP<br />
L/Lock + Process<br />
▲<br />
▼<br />
▼<br />
ENTER<br />
ENTER<br />
☞ Only available if you<br />
have an <strong>iH</strong> Interface<br />
Module fitted with an<br />
Auxiliary Interface Card<br />
connected to the <strong>iH</strong><br />
system.<br />
☞ Only available if you<br />
have an <strong>iH</strong> Interface<br />
Module fitted with an<br />
Auxiliary Interface Card<br />
connected to the <strong>iH</strong><br />
system.<br />
SELECT PUMP<br />
Booster pump<br />
▼<br />
ENTER<br />
☞ Only available when the<br />
HCMB pump has been<br />
automatically shut down:<br />
see Section 5.13.<br />
EDWARDS <strong>iH</strong><br />
DISPLAY TERMINAL<br />
Normal [4-5]<br />
Figure 4-3 - Switch on menu<br />
<strong>iH</strong> <strong>Dry</strong> <strong>Pumping</strong> <strong>Systems</strong> 4-7
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