Edwards iH Dry Pumping Systems, iH80, iH600, iH1000

Section Title Page
2.6 Electrical data 2-14
2.7 Gas system 2-15
2.8 Materials in contact with process gases 2-16
2.9 Fire safety 2-16
2.10 Resource conservation 2-17
2.11 Default setpoints 2-17
2.12 Connections 2-18
2.13 Tracer gas analysis 2-19
2.14 Disconnect box (accessory) 2-20
2.14.1 General 2-20
2.14.2 Operating conditions 2-20
2.14.3 Electrical data 2-20
2.15 Item numbers 2-20
3 INSTALLATION 3-1
3.1 Safety 3-1
3.2 Installation checklist 3-2
3.3 Unpack and inspect 3-3
3.4 Remove the enclosure panels 3-5
3.5 Reconfigure the nitrogen and/or water connections (if required) 3-7
3.6 Locate the iH system 3-7
3.7 Check the pump oil-level(s) 3-9
3.7.1 iH80 systems 3-9
3.7.2 iH600/iH1000 systems 3-11
3.8 Install or replace the pump display terminal and optional accessories
(if necessary) 3-11
3.8.1 Install the pump display terminal 3-11
3.8.2 Install optional accessories 3-11
3.9 Connect the iH inlet to your vacuum system 3-12
3.10 Connect the iH exhaust outlet to your exhaust-extraction system 3-14
3.11 Connect to your factory extraction system (optional) 3-15
3.12 Connect the nitrogen supply 3-16
3.13 Leak test the system 3-16
3.14 Install additional safety equipment (optional) 3-18
3.15 Connect to your emergency stop circuit (optional) 3-20
3.16 Electrical supply and RF earth (ground) connections 3-22
3.16.1 Reconfigure the iH system for your electrical supply
(if necessary) 3-22
3.16.2 Reconfigure the pump(s) for your electrical supply (if necessary) 3-24
3.16.3 Connect the electrical supply to the iH system 3-26
3.16.4 Connect an additional RF earth (optional) 3-27
3.17 Refit the enclosure panels 3-28
3.18 Connect the cooling-water hoses 3-28
3.19 Adjust the interstage purge flow rates if necessary 3-29
3.20 Commission the iH system 3-29
3.20.1 Switch on an iH80/iH1000 system 3-29
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iH Dry Pumping Systems