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Edwards iH Dry Pumping Systems, iH80, iH600, iH1000

Edwards iH Dry Pumping Systems, iH80, iH600, iH1000

Edwards iH Dry Pumping Systems, iH80, iH600, iH1000

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Illustrations (continued)<br />

Figure Title Page<br />

6-3 Fit insulation jackets 6-7<br />

6-4 Clean the exhaust check-valve 6-8<br />

6-5 Try to turn the HCDP pump 6-18<br />

6-6 System lockout/tagout procedures 6-19<br />

Tables<br />

Table Title Page<br />

1-1 Safety sensors 1-22<br />

2-1 Technical data 2-2<br />

2-2 Full load current ratings 2-15<br />

2-3 Nitrogen purge flow rates: high gas configuration 2-16<br />

2-4 Electrics box default setpoints 2-17<br />

2-5 Electronics module default setpoints 2-17<br />

2-6 Gas module default setpoints: high gas configuration 2-18<br />

2-7 Test parameters 2-19<br />

2-8 Test results 2-19<br />

3-1 Installation checklist 3-2<br />

3-2 Checklist of components 3-4<br />

3-3 Pins in the <strong>iH</strong> tool interface module connector plug3-20<br />

3-4 Pins in the electrical supply connector 3-27<br />

4-1 Menu structure 4-5<br />

5-1 Configuration store nominal gas flows 5-4<br />

5-2 Status menu sensor reading displays 5-10<br />

6-1 Warning messages 6-21<br />

6-2 Alarm messages 6-26<br />

6-3 Fault messages 6-28<br />

6-4 Fault parameters 6-29<br />

6-5 Fault types 6-30<br />

<strong>iH</strong> <strong>Dry</strong> <strong>Pumping</strong> <strong>Systems</strong><br />

vii

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