Edwards iH Dry Pumping Systems, iH80, iH600, iH1000
Edwards iH Dry Pumping Systems, iH80, iH600, iH1000
Edwards iH Dry Pumping Systems, iH80, iH600, iH1000
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Switch off<br />
▲<br />
ENTER Pump off<br />
CANCEL Clears<br />
ENTER<br />
☞ Single pump<br />
menu (that is, no<br />
load-lock pump<br />
is<br />
connected).<br />
SELECT PUMP<br />
Process pump<br />
▲<br />
▼<br />
ENTER<br />
☞ Multi pump<br />
menu (that is, a<br />
load-lock pump<br />
is connected).<br />
SELECT PUMP<br />
Load lock pump<br />
▲<br />
▼<br />
ENTER<br />
☞ Only available if you have<br />
an <strong>iH</strong> Interface Module<br />
fitted with an Auxiliary<br />
Interface Card connected<br />
to the <strong>iH</strong> system.<br />
SELECT PUMP<br />
L/Lock + Process<br />
▼<br />
ENTER<br />
AUTO SHUTDOWN <<br />
FAST SHUTDOWN<br />
☞ Only available if you have<br />
an <strong>iH</strong> Interface Module<br />
fitted with an Auxiliary<br />
Interface Card connected<br />
to the <strong>iH</strong> system.<br />
▲<br />
▼<br />
AUTO SHUTDOWN<br />
FAST SHUTDOWN <<br />
▲<br />
▼<br />
ENTER<br />
Normal [4-5]<br />
Figure 4-4 - Switch off menu<br />
4-8 <strong>iH</strong> <strong>Dry</strong> <strong>Pumping</strong> <strong>Systems</strong>
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