Edwards iH Dry Pumping Systems, iH80, iH600, iH1000

Section Title Page
5.17 Disconnect box and photohelic switch/gauge (accessories) 5-15
5.17.1 Normal startup 5-15
5.17.2 Restart after fault 5-15
5.17.3 Shutdown 5-16
5.17.4 Local EMO 5-16
5.17.5 Remote EMO 5-16
5.17.6 Photohelic gauge 5-16
5.17.7 Brownout 5-16
6 MAINTENANCE 6-1
6.1 Safety 6-1
6.2 Correct use of tube fittings 6-2
6.2.1 Fit a tube fitting6-2
6.2.2 Reconnect a tube fitting6-4
6.3 Maintenance frequency 6-4
6.4 Inspect the connections, pipelines, cables and fittings 6-4
6.5 Check the purge gas flow rates 6-5
6.6 Inspect and clean the exhaust-pipe, elbow and check-valve 6-5
6.6.1 Dismantle, clean and refit the exhaust-pipe and elbow 6-5
6.6.2 Clean and refit the check-valve (if fitted) 6-7
6.7 Check the HCMB pump oil-level (iH600/iH1000 only) 6-9
6.8 Check the HCDP pump oil-level 6-10
6.9 Change the HCDP pump oil 6-11
6.10 Change the HCMB pump oil (iH600/iH1000 only) 6-12
6.11 Zero the gas module flow transducer 6-13
6.12 Adjust the pump display terminal display viewing angle 6-13
6.13 Replace a fuse 6-14
6.14 Replace the pump display terminal 6-14
6.15 Relocate the iH system for maintenance 6-15
6.16 Check for free rotation of the HCDP pump 6-16
6.17 Fault finding6-17
6.17.1 Warning and alarm message fault finding 6-17
6.17.2 Other fault finding6-17
6.18 Disconnect box and photohelic switch/gauge (accessories) 6-19
6.18.1 Introduction 6-20
6.18.2 Fault finding6-20
6.18.3 Fuse replacement 6-20
7 STORAGE AND DISPOSAL 7-1
7.1 Storage 7-1
7.2 Disposal 7-1
7.3 Transportation 7-2
iv
iH Dry Pumping Systems