Edwards iH Dry Pumping Systems, iH80, iH600, iH1000

2.13 Tracer gas analysis
IH600 pumping system tracer gas test results are as follows (see Tables 2-7 through 2-8): Note
that because the iH600 has the largest iH enclosure size, these results qualify the iH80 and
iH1000 enclosures.
Test Parameters
Tracer gas SF 6
Tracer gas concentration 4.00%
Tracer gas release rates
28 slpm
Tracer gas release point
Exhaust check valve
Tracer release direction
Toward top of pump
Process gas
Nitrogen
Exhaust flow rate (m 3 /h) 180.0
Volume of enclosure (m 3 ) 0.256
Free volume of enclosure (m 3 ) 0.158
Air changes per minute 19
Enclosure modifications
142mm duct connected to top of enclosure
Gas Name
Max Flow
(slm)
TLV
(ppm)
Table 2-7 - Test parameters
25% TLV
(ppm)
Value
Obtained
(ppm)
DCS 6 5 1.25 0.03 0.090 Pass
HCL 10 5 1.25 0.03 0.150 Pass
HF 10 3 0.75 0.03 0.150 Pass
NF 3 15 10 2.50 0.03 0.225 Pass
SiH 4 6 5 1.25 0.03 0.090 Pass
SF 6 12 1000 250 0.03 0.180 Pass
CIF 3 1.6 0.1 0.025 0.03 0.024 Pass
TEOS 0.7 20 5 0.03 0.0105 Pass
AsH 3 0.5 0.05 0.0125 0.03 0.0075 Pass
PH 3 0.5 0.3 0.075 0.03 0.0075 Pass
WF 6 0.5 10 2.5 0.03 0.0075 Pass
CO 1 50 12.5 0.03 0.015 Pass
H 2 2 4000 1000 0.03 0.03 Pass
* Pass indicates acceptable enclosure (satisfies SEMI S2 criteria of less than 25.0 % of the TLV)
Table 2-8 - Test results
ERC
Pass/Fail*
iH Dry Pumping Systems 2-19